Scanning acoustic microscopy for characterization of coatings and near-surface features of ceramics

Jun Qu, Peter J. Blau

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Scanning Acoustic Microscopy (SAcM) has been widely used for non-destructive evaluation (NDE) in various fields such as material characterization, electronics, and biomedicine. SAcM uses high-frequency acoustic waves (60 MHz to 2.0 GHz) providing much higher resolution (up to 0.5 μ.m) compared to conventional ultrasonic NDE, which is typically about 500 μm. SAcM offers the ability to non-destructively image subsurface features and visualize the variations in elastic properties. These attributes make SAcM a valuable tool for characterizing near-surface material properties and detecting fine-scale flaws. This paper presents some recent applications of SAcM in detecting subsurface damage, assessing coatings, and visualizing residual stress for ceramic and semiconductor materials.

Original languageEnglish
Title of host publicationMechanical Properties and Performance of Engineering Ceramics and Composites II - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites
Pages267-274
Number of pages8
Edition2
StatePublished - 2006
EventMechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites - Cocoa Beach, FL, United States
Duration: Jan 22 2006Jan 27 2006

Publication series

NameCeramic Engineering and Science Proceedings
Number2
Volume27
ISSN (Print)0196-6219

Conference

ConferenceMechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites
Country/TerritoryUnited States
CityCocoa Beach, FL
Period01/22/0601/27/06

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