TY - GEN
T1 - Scanning acoustic microscopy for characterization of coatings and near-surface features of ceramics
AU - Qu, Jun
AU - Blau, Peter J.
PY - 2006
Y1 - 2006
N2 - Scanning Acoustic Microscopy (SAcM) has been widely used for non-destructive evaluation (NDE) in various fields such as material characterization, electronics, and biomedicine. SAcM uses high-frequency acoustic waves (60 MHz to 2.0 GHz) providing much higher resolution (up to 0.5 μ.m) compared to conventional ultrasonic NDE, which is typically about 500 μm. SAcM offers the ability to non-destructively image subsurface features and visualize the variations in elastic properties. These attributes make SAcM a valuable tool for characterizing near-surface material properties and detecting fine-scale flaws. This paper presents some recent applications of SAcM in detecting subsurface damage, assessing coatings, and visualizing residual stress for ceramic and semiconductor materials.
AB - Scanning Acoustic Microscopy (SAcM) has been widely used for non-destructive evaluation (NDE) in various fields such as material characterization, electronics, and biomedicine. SAcM uses high-frequency acoustic waves (60 MHz to 2.0 GHz) providing much higher resolution (up to 0.5 μ.m) compared to conventional ultrasonic NDE, which is typically about 500 μm. SAcM offers the ability to non-destructively image subsurface features and visualize the variations in elastic properties. These attributes make SAcM a valuable tool for characterizing near-surface material properties and detecting fine-scale flaws. This paper presents some recent applications of SAcM in detecting subsurface damage, assessing coatings, and visualizing residual stress for ceramic and semiconductor materials.
UR - http://www.scopus.com/inward/record.url?scp=33845976299&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33845976299
SN - 0470080523
SN - 9780470080528
T3 - Ceramic Engineering and Science Proceedings
SP - 267
EP - 274
BT - Mechanical Properties and Performance of Engineering Ceramics and Composites II - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites
T2 - Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites
Y2 - 22 January 2006 through 27 January 2006
ER -