Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

J. J. Rocca; Y. Wang; M. A. Larotonda; B. M. Luther; M. Berrill; D. Alessi

doi:10.1364/OL.30.002581

Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, D. Alessi

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114 Scopus citations

Abstract

We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain–length product G × L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphire laser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 γW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.

Original language	English
Pages (from-to)	2581-2583
Number of pages	3
Journal	Optics Letters
Volume	30
Issue number	19
DOIs	https://doi.org/10.1364/OL.30.002581
State	Published - 2005
Externally published	Yes

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abstract = "We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain–length product G × L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphire laser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 γW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.",

author = "Rocca, {J. J.} and Y. Wang and Larotonda, {M. A.} and Luther, {B. M.} and M. Berrill and D. Alessi",

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T1 - Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

AU - Rocca, J. J.

AU - Wang, Y.

AU - Larotonda, M. A.

AU - Luther, B. M.

AU - Berrill, M.

AU - Alessi, D.

PY - 2005

Y1 - 2005

N2 - We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain–length product G × L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphire laser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 γW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.

AB - We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain–length product G × L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphire laser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 γW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.

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U2 - 10.1364/OL.30.002581

DO - 10.1364/OL.30.002581

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VL - 30

SP - 2581

EP - 2583

JO - Optics Letters

JF - Optics Letters

IS - 19

ER -

Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

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