Abstract
Recently, there has been an increasing demand to perform real-time in-situ chemical detection of hazardous materials. In the present studies, we have developed microcantilevers (MCs), nanostructured on one side and configured in spatially-dense arrays, for the sensitive detection of organic vapor mixtures. MCs singularly coated with seven different molecular recognition phases (MRPs) exhibit differential selectivity and response. The phases are films of nanodimensional thickness which are deposited by physical vapor deposition (PVD) method and have been structurally characterized post deposition. Analyte-induced bending of the MCs in arrays is monitored using beam displacements of vertical cavity surface emitting lasers using a time multiplexing scheme. The magnitudes and shapes of the array response profiles are unique to the analytes tested. Also, larger responses to the analytes are realized increasing layer thickness.
Original language | English |
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Pages (from-to) | 238-245 |
Number of pages | 8 |
Journal | Sensor Letters |
Volume | 2 |
Issue number | 3-4 |
DOIs | |
State | Published - Sep 2004 |
Keywords
- Differentially-coated
- Microcantilever sensor arrays
- Nanostructured
- Physical vapor deposition