Abstract
The stability of the properties of Hg-based superconducting thin films has been studied during conventional photolithographic patterning processes. The patterning process was divided into individual steps such as photoresist baking, developing and etching in order to observe the effect of each step separately on the superconducting properties of the samples. After baking of the photoresist, a considerable degradation in the superconducting properties was observed, while samples did not show any visible degradation after they were etched with acid solution.
Original language | English |
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Pages (from-to) | 56-60 |
Number of pages | 5 |
Journal | Physica C: Superconductivity and its Applications |
Volume | 325 |
Issue number | 1-2 |
DOIs | |
State | Published - Nov 10 1999 |
Funding
We thank Dr. D.K. Christen for his helpful discussions and for reviewing this manuscript. This work is supported in part by USAFOSR Grant No. F49620-96-1-0358, NSF Grant No. DMR-9632279 and NSF EPSCoR fund.
Keywords
- Hg-1212
- High-temperature superconductivity
- Photolithography
- Stability