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Dive into the research topics of 'Resistance degradation of CVD (Ba,Sr)TiO3 thin films for DRAMs and integrated decoupling capacitors'. Together they form a unique fingerprint.- Sort by
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C. Basceri, M. A. Wells, S. K. Streiffer, A. I. Kingon, S. Bilodeau, R. Carl, P. C. van Buskirk, S. R. Summerfelt, P. McIntyre
Research output: Contribution to conference › Paper › peer-review