Resistance degradation of CVD (Ba,Sr)TiO3 thin films for DRAMs and integrated decoupling capacitors
- C. Basceri
- , M. A. Wells
- , S. K. Streiffer
- , A. I. Kingon
- , S. Bilodeau
- , R. Carl
- , P. C. van Buskirk
- , S. R. Summerfelt
- , P. McIntyre
Research output: Contribution to conference › Paper › peer-review
3
Scopus
citations