Resistance degradation of CVD (Ba,Sr)TiO3 thin films for DRAMs and integrated decoupling capacitors

C. Basceri, M. A. Wells, S. K. Streiffer, A. I. Kingon, S. Bilodeau, R. Carl, P. C. van Buskirk, S. R. Summerfelt, P. McIntyre

Research output: Contribution to conferencePaperpeer-review

3 Scopus citations

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