Replication of metal-based microscale structures

J. Jiang; W. J. Meng; G. B. Sinclair; C. O. Stevens; E. Lara-Curzio

doi:10.1063/1.2436338

Replication of metal-based microscale structures

J. Jiang, W. J. Meng, G. B. Sinclair, C. O. Stevens, E. Lara-Curzio

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compression molding of metal-based HARMS from surface-engineered, microscale, refractory metal inserts is summarized.

Original language	English
Title of host publication	SYNCHROTRON RADIATION INSTRUMENTATION
Subtitle of host publication	Ninth International Conference on Synchrotron Radiation Instrumentation
Pages	1451-1455
Number of pages	5
DOIs	https://doi.org/10.1063/1.2436338
State	Published - 2007
Externally published	Yes
Event	SYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation - Daegu, Korea, Republic of Duration: May 28 2006 → Jun 28 2006

Publication series

Name	AIP Conference Proceedings
Volume	879
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Conference

Conference	SYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation
Country/Territory	Korea, Republic of
City	Daegu
Period	05/28/06 → 06/28/06

Keywords

LiGA technology
Metal-based HARMS
Microfabrication
Replication

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1063/1.2436338

Cite this

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title = "Replication of metal-based microscale structures",

abstract = "Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compression molding of metal-based HARMS from surface-engineered, microscale, refractory metal inserts is summarized.",

keywords = "LiGA technology, Metal-based HARMS, Microfabrication, Replication",

author = "J. Jiang and Meng, {W. J.} and Sinclair, {G. B.} and Stevens, {C. O.} and E. Lara-Curzio",

year = "2007",

doi = "10.1063/1.2436338",

language = "English",

isbn = "0735403732",

series = "AIP Conference Proceedings",

pages = "1451--1455",

booktitle = "SYNCHROTRON RADIATION INSTRUMENTATION",

note = "SYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation ; Conference date: 28-05-2006 Through 28-06-2006",

}

Jiang, J, Meng, WJ, Sinclair, GB, Stevens, CO & Lara-Curzio, E 2007, Replication of metal-based microscale structures. in SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation. AIP Conference Proceedings, vol. 879, pp. 1451-1455, SYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation, Daegu, Korea, Republic of, 05/28/06. https://doi.org/10.1063/1.2436338

Replication of metal-based microscale structures. / Jiang, J.; Meng, W. J.; Sinclair, G. B. et al.
SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation. 2007. p. 1451-1455 (AIP Conference Proceedings; Vol. 879).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Replication of metal-based microscale structures

AU - Jiang, J.

AU - Meng, W. J.

AU - Sinclair, G. B.

AU - Stevens, C. O.

AU - Lara-Curzio, E.

PY - 2007

Y1 - 2007

N2 - Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compression molding of metal-based HARMS from surface-engineered, microscale, refractory metal inserts is summarized.

AB - Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compression molding of metal-based HARMS from surface-engineered, microscale, refractory metal inserts is summarized.

KW - LiGA technology

KW - Metal-based HARMS

KW - Microfabrication

KW - Replication

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DO - 10.1063/1.2436338

M3 - Conference contribution

AN - SCOPUS:33947374638

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SN - 9780735403734

T3 - AIP Conference Proceedings

SP - 1451

EP - 1455

BT - SYNCHROTRON RADIATION INSTRUMENTATION

T2 - SYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation

Y2 - 28 May 2006 through 28 June 2006

ER -

Replication of metal-based microscale structures

Abstract

Publication series

Conference

Keywords

UN SDGs

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