Remote infrared radiation detection using piezoresistive microcantilevers

P. G. Datskos, P. I. Oden, T. Thundat, E. A. Wachter, R. J. Warmack, S. R. Hunter

Research output: Contribution to journalArticlepeer-review

94 Scopus citations

Abstract

A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (<ms) and a slower one (∼10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be ∼70 nW/Hz1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors.

Original languageEnglish
Pages (from-to)2986-2988
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number20
DOIs
StatePublished - Nov 11 1996
Externally publishedYes

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