TY - JOUR
T1 - Recent advances in pulsed-laser deposition of complex oxides
AU - Christen, H. M.
AU - Eres, G.
PY - 2008/7/1
Y1 - 2008/7/1
N2 - Pulsed-laser deposition (PLD) is one of the most promising techniques for the formation of complex-oxide heterostructures, superlattices, and well controlled interfaces. The first part of this paper presents a review of several useful modifications of the process, including methods inspired by combinatorial approaches. We then discuss detailed growth kinetics results, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness. Time-resolved surface x-ray diffraction measurements show that crystallization and the majority of interlayer mass transport occur on timescales that are comparable to those of the plume/substrate interaction, providing direct experimental evidence that a growth regime exists in which non-thermal processes dominate PLD. This understanding shows how kinetic growth manipulation can bring PLD closer to ideal LBL than any other growth method available today.
AB - Pulsed-laser deposition (PLD) is one of the most promising techniques for the formation of complex-oxide heterostructures, superlattices, and well controlled interfaces. The first part of this paper presents a review of several useful modifications of the process, including methods inspired by combinatorial approaches. We then discuss detailed growth kinetics results, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness. Time-resolved surface x-ray diffraction measurements show that crystallization and the majority of interlayer mass transport occur on timescales that are comparable to those of the plume/substrate interaction, providing direct experimental evidence that a growth regime exists in which non-thermal processes dominate PLD. This understanding shows how kinetic growth manipulation can bring PLD closer to ideal LBL than any other growth method available today.
UR - http://www.scopus.com/inward/record.url?scp=48349116502&partnerID=8YFLogxK
U2 - 10.1088/0953-8984/20/26/264005
DO - 10.1088/0953-8984/20/26/264005
M3 - Article
AN - SCOPUS:48349116502
SN - 0953-8984
VL - 20
JO - Journal of Physics Condensed Matter
JF - Journal of Physics Condensed Matter
IS - 26
M1 - 264005
ER -