Real time x-ray observation of lattice pulling during growth of epitaxial Pb (Zr,Ti)O3 films

R. V. Wang; G. B. Stephenson; D. D. Fong; F. Jiang; P. H. Fuoss; J. A. Eastman; S. K. Streiffer; K. Latifi; Carol Thompson

doi:10.1063/1.2387980

Real time x-ray observation of lattice pulling during growth of epitaxial Pb (Zr,Ti)O₃ films

R. V. Wang, G. B. Stephenson, D. D. Fong, F. Jiang, P. H. Fuoss, J. A. Eastman, S. K. Streiffer, K. Latifi, Carol Thompson

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Using surface-sensitive grazing incidence synchrotron x-ray scattering and fluorescence, the authors have monitored the evolution of strain and Zr composition in situ during metal-organic chemical vapor deposition of Pb (Zr,Ti) O3 epitaxially grown on (001) SrTi O3. The Zr fraction of the growing surface increases dramatically as the film relaxes, resulting in compositional nonuniformity in the growth direction. The observed composition variation can be quantitatively explained by the lattice pulling model, which includes strain energy in the thermodynamic equilibria for growth.

Original language	English
Article number	221914
Journal	Applied Physics Letters
Volume	89
Issue number	22
DOIs	https://doi.org/10.1063/1.2387980
State	Published - 2006
Externally published	Yes

Funding

This work and use of the Advanced Photon Source, was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, under Contract No. W-31-109-ENG-38.

Funders	Funder number
U.S. Department of Energy
Basic Energy Sciences	W-31-109-ENG-38

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title = "Real time x-ray observation of lattice pulling during growth of epitaxial Pb (Zr,Ti)O3 films",

abstract = "Using surface-sensitive grazing incidence synchrotron x-ray scattering and fluorescence, the authors have monitored the evolution of strain and Zr composition in situ during metal-organic chemical vapor deposition of Pb (Zr,Ti) O3 epitaxially grown on (001) SrTi O3. The Zr fraction of the growing surface increases dramatically as the film relaxes, resulting in compositional nonuniformity in the growth direction. The observed composition variation can be quantitatively explained by the lattice pulling model, which includes strain energy in the thermodynamic equilibria for growth.",

author = "Wang, {R. V.} and Stephenson, {G. B.} and Fong, {D. D.} and F. Jiang and Fuoss, {P. H.} and Eastman, {J. A.} and Streiffer, {S. K.} and K. Latifi and Carol Thompson",

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doi = "10.1063/1.2387980",

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journal = "Applied Physics Letters",

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T1 - Real time x-ray observation of lattice pulling during growth of epitaxial Pb (Zr,Ti)O3 films

AU - Wang, R. V.

AU - Stephenson, G. B.

AU - Fong, D. D.

AU - Jiang, F.

AU - Fuoss, P. H.

AU - Eastman, J. A.

AU - Streiffer, S. K.

AU - Latifi, K.

AU - Thompson, Carol

PY - 2006

Y1 - 2006

N2 - Using surface-sensitive grazing incidence synchrotron x-ray scattering and fluorescence, the authors have monitored the evolution of strain and Zr composition in situ during metal-organic chemical vapor deposition of Pb (Zr,Ti) O3 epitaxially grown on (001) SrTi O3. The Zr fraction of the growing surface increases dramatically as the film relaxes, resulting in compositional nonuniformity in the growth direction. The observed composition variation can be quantitatively explained by the lattice pulling model, which includes strain energy in the thermodynamic equilibria for growth.

AB - Using surface-sensitive grazing incidence synchrotron x-ray scattering and fluorescence, the authors have monitored the evolution of strain and Zr composition in situ during metal-organic chemical vapor deposition of Pb (Zr,Ti) O3 epitaxially grown on (001) SrTi O3. The Zr fraction of the growing surface increases dramatically as the film relaxes, resulting in compositional nonuniformity in the growth direction. The observed composition variation can be quantitatively explained by the lattice pulling model, which includes strain energy in the thermodynamic equilibria for growth.

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VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 22

M1 - 221914

ER -

Real time x-ray observation of lattice pulling during growth of epitaxial Pb (Zr,Ti)O₃ films

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