Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)

G. Eres; J. Z. Tischler; C. M. Rouleau; B. C. Larson; H. M. Christen; P. Zschack

doi:10.1016/B978-1-84569-934-5.50009-6

Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)

G. Eres, J. Z. Tischler, C. M. Rouleau, B. C. Larson, H. M. Christen, P. Zschack

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

2 Scopus citations

Abstract

We review recent results in the study of pulsed laser deposition growth kinetics using real-time surface X-ray diffraction. interlayer transport as the primary driving force behind formation of atomically sharp layers is analyzed quantitatively from the measurements of time constants and shot-to-shot changes in single laser shot time dependent coverages in the growth of the model perovskite srTiO₃. The results show that direct deposition into the open layers and very fast interlayer transport driven by energetic species during the arrival of the laser plume are the main components of layer growth per laser shot in both homo-and heteroepitaxy of complex oxides.

Original language	English
Title of host publication	In Situ Characterization of Thin Film Growth
Publisher	Elsevier Ltd
Pages	239-273
Number of pages	35
ISBN (Print)	9781845699345
DOIs	https://doi.org/10.1016/B978-1-84569-934-5.50009-6
State	Published - Oct 2011

Keywords

Interlayer transport
Perovskite srTiO
Pulsed laser deposition
Real-time surface X-ray diffraction
Single shot transient

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10.1016/B978-1-84569-934-5.50009-6

Cite this

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title = "Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)",

abstract = "We review recent results in the study of pulsed laser deposition growth kinetics using real-time surface X-ray diffraction. interlayer transport as the primary driving force behind formation of atomically sharp layers is analyzed quantitatively from the measurements of time constants and shot-to-shot changes in single laser shot time dependent coverages in the growth of the model perovskite srTiO3. The results show that direct deposition into the open layers and very fast interlayer transport driven by energetic species during the arrival of the laser plume are the main components of layer growth per laser shot in both homo-and heteroepitaxy of complex oxides.",

keywords = "Interlayer transport, Perovskite srTiO, Pulsed laser deposition, Real-time surface X-ray diffraction, Single shot transient",

author = "G. Eres and Tischler, {J. Z.} and Rouleau, {C. M.} and Larson, {B. C.} and Christen, {H. M.} and P. Zschack",

year = "2011",

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T1 - Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)

AU - Eres, G.

AU - Tischler, J. Z.

AU - Rouleau, C. M.

AU - Larson, B. C.

AU - Christen, H. M.

AU - Zschack, P.

PY - 2011/10

Y1 - 2011/10

N2 - We review recent results in the study of pulsed laser deposition growth kinetics using real-time surface X-ray diffraction. interlayer transport as the primary driving force behind formation of atomically sharp layers is analyzed quantitatively from the measurements of time constants and shot-to-shot changes in single laser shot time dependent coverages in the growth of the model perovskite srTiO3. The results show that direct deposition into the open layers and very fast interlayer transport driven by energetic species during the arrival of the laser plume are the main components of layer growth per laser shot in both homo-and heteroepitaxy of complex oxides.

AB - We review recent results in the study of pulsed laser deposition growth kinetics using real-time surface X-ray diffraction. interlayer transport as the primary driving force behind formation of atomically sharp layers is analyzed quantitatively from the measurements of time constants and shot-to-shot changes in single laser shot time dependent coverages in the growth of the model perovskite srTiO3. The results show that direct deposition into the open layers and very fast interlayer transport driven by energetic species during the arrival of the laser plume are the main components of layer growth per laser shot in both homo-and heteroepitaxy of complex oxides.

KW - Interlayer transport

KW - Perovskite srTiO

KW - Pulsed laser deposition

KW - Real-time surface X-ray diffraction

KW - Single shot transient

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U2 - 10.1016/B978-1-84569-934-5.50009-6

DO - 10.1016/B978-1-84569-934-5.50009-6

M3 - Chapter

AN - SCOPUS:84868573921

SN - 9781845699345

SP - 239

EP - 273

BT - In Situ Characterization of Thin Film Growth

PB - Elsevier Ltd

ER -

Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)

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Keywords

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