Reactive solid-state dewetting of Cu-Ni films on silicon

Raphael Clearfield, Justin G. Railsback, Ryan C. Pearce, Dale K. Hensley, Jason D. Fowlkes, Miguel Fuentes-Cabrera, Michael L. Simpson, Philip D. Rack, Anatoli V. Melechko

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Abstract

The behavior of a 50 nm Cu-Ni alloy film on Si in a process of reactive solid-state dewetting is presented. The films were annealed at a range of temperatures (300-700 °C) in 1% H2 99% N2 reducing atmosphere. The resulting alloy and silicide particles formed by film dewetting and film reaction with the substrate were distinguished by selective wet etching and examined by scanning electron microscopy and spectroscopy. After potassium hydroxide etch, regions that etch slower than silicon substrate have distribution statistics similar to the alloy and silicide particles prior to their removal, indicating strong coupling between mass transport across the interface and along the surface.

Original languageEnglish
Article number253101
JournalApplied Physics Letters
Volume97
Issue number25
DOIs
StatePublished - Dec 20 2010

Funding

This research was supported by the Materials Sciences and Engineering Division, Office of Basic Energy Sciences, U.S. Department of Energy (processing, analytical microscopy, and experimental design). Thin film deposition was conducted through a user project at the Center for Nanophase Materials Sciences, Oak Ridge National Laboratory sponsored by the Scientific User Facilities Division, Office of Basic Energy Sciences, U.S. Department of Energy.

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