Raman microscopic characterization of proton-irradiated polycrystalline diamond films

R. L. Newton; J. L. Davidson; M. J. Lance

doi:10.1016/j.diamond.2004.09.008

Raman microscopic characterization of proton-irradiated polycrystalline diamond films

R. L. Newton
, J. L. Davidson
, M. J. Lance

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The microstructural effects of irradiating polycrystalline diamond films with protons was examined. The dosages ranged from 10¹⁵ to 10 ¹⁷ H⁺/cm². Scanning electron microscopy (SEM) and Raman microscopy were used to examine the ion implantation related changes as a function of depth. The results indicate that single crystal diamond and polycrystalline diamond exhibit similar behavior with respect to predicted vs. actual ion implant range, microstructural damage, and ion behavior both along the implant path and near the stopping location of the ions. Published by Elsevier B.V.

Original language	English
Pages (from-to)	173-178
Number of pages	6
Journal	Diamond and Related Materials
Volume	14
Issue number	2
DOIs	https://doi.org/10.1016/j.diamond.2004.09.008
State	Published - Feb 2005

Funding

This work was supported by NASA's Marshall Space Flight Center. MJL sponsored by the Division of Materials Sciences and Engineering, U. S. Department of Energy, under Contract DE-AC05-00OR22725 with UT-Battelle, LLC. Special thanks to Mr. Charles Griffith of MSFC for sample preparation and Mr. Jimmy Coston of MSFC for the SEM analysis.

Keywords

Diamond film
Microelectromechanical Systems (MEMS)
Radiation-induced effects

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10.1016/j.diamond.2004.09.008

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title = "Raman microscopic characterization of proton-irradiated polycrystalline diamond films",

abstract = "The microstructural effects of irradiating polycrystalline diamond films with protons was examined. The dosages ranged from 1015 to 10 17 H+/cm2. Scanning electron microscopy (SEM) and Raman microscopy were used to examine the ion implantation related changes as a function of depth. The results indicate that single crystal diamond and polycrystalline diamond exhibit similar behavior with respect to predicted vs. actual ion implant range, microstructural damage, and ion behavior both along the implant path and near the stopping location of the ions. Published by Elsevier B.V.",

keywords = "Diamond film, Microelectromechanical Systems (MEMS), Radiation-induced effects",

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T1 - Raman microscopic characterization of proton-irradiated polycrystalline diamond films

AU - Newton, R. L.

AU - Davidson, J. L.

AU - Lance, M. J.

PY - 2005/2

Y1 - 2005/2

N2 - The microstructural effects of irradiating polycrystalline diamond films with protons was examined. The dosages ranged from 1015 to 10 17 H+/cm2. Scanning electron microscopy (SEM) and Raman microscopy were used to examine the ion implantation related changes as a function of depth. The results indicate that single crystal diamond and polycrystalline diamond exhibit similar behavior with respect to predicted vs. actual ion implant range, microstructural damage, and ion behavior both along the implant path and near the stopping location of the ions. Published by Elsevier B.V.

AB - The microstructural effects of irradiating polycrystalline diamond films with protons was examined. The dosages ranged from 1015 to 10 17 H+/cm2. Scanning electron microscopy (SEM) and Raman microscopy were used to examine the ion implantation related changes as a function of depth. The results indicate that single crystal diamond and polycrystalline diamond exhibit similar behavior with respect to predicted vs. actual ion implant range, microstructural damage, and ion behavior both along the implant path and near the stopping location of the ions. Published by Elsevier B.V.

KW - Diamond film

KW - Microelectromechanical Systems (MEMS)

KW - Radiation-induced effects

UR - https://www.scopus.com/pages/publications/12444305391

U2 - 10.1016/j.diamond.2004.09.008

DO - 10.1016/j.diamond.2004.09.008

M3 - Article

AN - SCOPUS:12444305391

SN - 0925-9635

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SP - 173

EP - 178

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 2

ER -

Raman microscopic characterization of proton-irradiated polycrystalline diamond films

Abstract

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Keywords

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