Raman and optical absorption studies of silicon carbide structure damage by ion implantation

Claudiu I. Muntele, Iulia C. Muntele, D. Ila, David B. Poker, Dale K. Hensley

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	191-195
Number of pages	5
Journal	Materials Research Society Symposium - Proceedings
Volume	719
DOIs	https://doi.org/10.1557/proc-719-f8.15
State	Published - 2002
Event	Defect and Impunity Engineered Semiconductors and Devices III - San Francisco, CA, United States Duration: Apr 1 2002 → Apr 5 2002

Access to Document

@article{e974aa84fcba4003b7d4352ea414f5a8,

title = "Raman and optical absorption studies of silicon carbide structure damage by ion implantation",

author = "Muntele, {Claudiu I.} and Muntele, {Iulia C.} and D. Ila and Poker, {David B.} and Hensley, {Dale K.}",

year = "2002",

doi = "10.1557/proc-719-f8.15",

language = "English",

volume = "719",

pages = "191--195",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Defect and Impunity Engineered Semiconductors and Devices III ; Conference date: 01-04-2002 Through 05-04-2002",

}

TY - JOUR

T1 - Raman and optical absorption studies of silicon carbide structure damage by ion implantation

AU - Muntele, Claudiu I.

AU - Muntele, Iulia C.

AU - Ila, D.

AU - Poker, David B.

AU - Hensley, Dale K.

PY - 2002

Y1 - 2002

UR - http://www.scopus.com/inward/record.url?scp=0036456297&partnerID=8YFLogxK

U2 - 10.1557/proc-719-f8.15

DO - 10.1557/proc-719-f8.15

M3 - Conference article

AN - SCOPUS:0036456297

SN - 0272-9172

VL - 719

SP - 191

EP - 195

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Defect and Impunity Engineered Semiconductors and Devices III

Y2 - 1 April 2002 through 5 April 2002

ER -