Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen

R. D. Evans; J. Bentley; K. L. More; G. L. Doll; J. T. Glass

doi:10.1063/1.1760232

Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen

R. D. Evans, J. Bentley, K. L. More, G. L. Doll, J. T. Glass

Center for Nanophase Matls Sciences

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sample was described by RDFs. Energy-filtered convergent-beam electron diffraction (EFCBED) and extended electron energy-loss fine structure (EXELFS) analyses were the methods, in the transmission electron microscope (TEM), to be used to obtain RDFs. The RDF characteristics were found to be correlated to thin film material properties.

Original language	English
Pages (from-to)	273-279
Number of pages	7
Journal	Journal of Applied Physics
Volume	96
Issue number	1
DOIs	https://doi.org/10.1063/1.1760232
State	Published - Jul 1 2004

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abstract = "The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sample was described by RDFs. Energy-filtered convergent-beam electron diffraction (EFCBED) and extended electron energy-loss fine structure (EXELFS) analyses were the methods, in the transmission electron microscope (TEM), to be used to obtain RDFs. The RDF characteristics were found to be correlated to thin film material properties.",

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AU - Doll, G. L.

AU - Glass, J. T.

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AB - The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sample was described by RDFs. Energy-filtered convergent-beam electron diffraction (EFCBED) and extended electron energy-loss fine structure (EXELFS) analyses were the methods, in the transmission electron microscope (TEM), to be used to obtain RDFs. The RDF characteristics were found to be correlated to thin film material properties.

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Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen

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