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Quantification of Dopant Profiles in SiGe HBT Devices

  • Eric J. Jones
  • , Jonathan Poplawsky
  • , Donavan Leonard
  • , Keith Chung
  • , Kevin Mercurio
  • , Paul Brabant
  • , Thomas Adam
  • , Patrick B. Shea
  • , Thomas Knight

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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