TY - GEN
T1 - PULSED LASER AND ION BEAM SURFACE MODIFICATION OF SINTERED ALPHA-SiC.
AU - More, K. L.
AU - Davis, R. F.
AU - Appleton, B. R.
AU - Lowdes, D.
AU - Smith, P.
PY - 1986
Y1 - 1986
N2 - Pulsed laser annealing and ion beam mixing have been used as surface modification techniques to enhance the physical properties of polycrystalline alpha -SiC. Thin Ni overlayers (20 nm - 100 nm) were evaporated onto the SiC surface. The specimens were subsequently irradiated with pulses of a ruby or krypton fluoride (KrF) excimer laser or bombarded with high energy Xe** plus or Si** plus ions. Both processes are non-equilibrium methods and each has been shown to induce unique microstructural changes at the SiC surface which are not attainable by conventional thermal treatments. Under particular (and optimum) processing conditions, these changes considerably increased the mechanical properties of the SiC; following laser irradiation, the fracture strength of the SiC was increased by as much as 50%, but after ion beam mixing, no strength increase was observed. High resolution cross-section transmission electron microscopy (X-TEM), scanning electron microscopy (SEM), and Rutherford backscattering techniques were used to characterize the extent of mixing between the Ni and the SiC as a result of the surface modification.
AB - Pulsed laser annealing and ion beam mixing have been used as surface modification techniques to enhance the physical properties of polycrystalline alpha -SiC. Thin Ni overlayers (20 nm - 100 nm) were evaporated onto the SiC surface. The specimens were subsequently irradiated with pulses of a ruby or krypton fluoride (KrF) excimer laser or bombarded with high energy Xe** plus or Si** plus ions. Both processes are non-equilibrium methods and each has been shown to induce unique microstructural changes at the SiC surface which are not attainable by conventional thermal treatments. Under particular (and optimum) processing conditions, these changes considerably increased the mechanical properties of the SiC; following laser irradiation, the fracture strength of the SiC was increased by as much as 50%, but after ion beam mixing, no strength increase was observed. High resolution cross-section transmission electron microscopy (X-TEM), scanning electron microscopy (SEM), and Rutherford backscattering techniques were used to characterize the extent of mixing between the Ni and the SiC as a result of the surface modification.
UR - http://www.scopus.com/inward/record.url?scp=0022927434&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0022927434
SN - 0931837162
T3 - Materials Research Society Symposia Proceedings
SP - 445
EP - 453
BT - Materials Research Society Symposia Proceedings
PB - Materials Research Soc
ER -