Abstract
The prospects for the location and identification of single atoms will be examined. It will be shown how aberration correction is becoming an established and essential tool for increasing the sensitivity in electron microscopy. It will be demonstrated that the STEM provides some unique advantages for the detection and electronic analysis of very small quantities of dopant atoms in the bulk of a sample.
Original language | English |
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Pages (from-to) | 523-532 |
Number of pages | 10 |
Journal | Design and Nature |
Volume | 6 |
State | Published - 2004 |
Event | Design and Nature II: Comparing Design in Nature with Science and Engineering - Rhodes, Greece Duration: Jun 28 2004 → Jun 30 2004 |