Prospects for single atom location and identification with aberration-corrected STEM

A. R. Lupini, M. Varela, A. Y. Borisevich, Y. Peng, S. J. Pennycook

Research output: Contribution to journalConference articlepeer-review

Abstract

The prospects for the location and identification of single atoms will be examined. It will be shown how aberration correction is becoming an established and essential tool for increasing the sensitivity in electron microscopy. It will be demonstrated that the STEM provides some unique advantages for the detection and electronic analysis of very small quantities of dopant atoms in the bulk of a sample.

Original languageEnglish
Pages (from-to)523-532
Number of pages10
JournalDesign and Nature
Volume6
StatePublished - 2004
EventDesign and Nature II: Comparing Design in Nature with Science and Engineering - Rhodes, Greece
Duration: Jun 28 2004Jun 30 2004

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