Abstract
The thin film electrolyte known as Lipon (lithium phosphorous oxynitride) has proven successful for planar thin film battery applications. Here, the sputter deposition of the amorphous LiPON electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10-100 μ arrays of pores, columns, and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted to be line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible by the sputtered flux. The composition varies, but remains within the range that gives sufficient Li + ionic conductivity, 2 ± 1 μS/cm.
| Original language | English |
|---|---|
| Pages (from-to) | 1507-1515 |
| Number of pages | 9 |
| Journal | Journal of Materials Research |
| Volume | 25 |
| Issue number | 8 |
| DOIs | |
| State | Published - Aug 2010 |
Funding
This research is sponsored by the DARPA Defense Science Office Division with assistance from the Division of Materials Sciences and Engineering, Office of Basic Energy Sciences, U.S. Department of Energy (G.M.V. and N.J.D.). The authors appreciate the help of Prof. Bruce Dunn in supplying the silver epoxy posts and Christopher Borman for assistance with the ICP studies. Notice: This manuscript has been authored by UT-Battelle, LLC, under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a non-exclusive, paid-up, irrevocable, world-wide license to publish or reproduce the published form of this manuscript, or allow others to do so, for United States Government purposes.