Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept

L. R. Baylor; W. L. Gardner; X. Yang; R. J. Kasica; B. Blalock; C. Durisety; J. Fowlkes; D. K. Hensley; S. Islam; D. C. Joy; A. V. Melechko; P. D. Rack; S. J. Randolph; R. Rucker; D. K. Thomas; M. L. Simpson

doi:10.1109/IVNC.2005.1619491

Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept

L. R. Baylor
, W. L. Gardner
, X. Yang
, R. J. Kasica
, B. Blalock
, C. Durisety
, J. Fowlkes
, D. K. Hensley
, S. Islam
, D. C. Joy
, A. V. Melechko
, P. D. Rack
, S. J. Randolph
, R. Rucker
, D. K. Thomas
, M. L. Simpson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005
Pages	74-75
Number of pages	2
DOIs	https://doi.org/10.1109/IVNC.2005.1619491
State	Published - 2005
Event	Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005 - Oxford, United Kingdom Duration: Jul 10 2005 → Jul 14 2005

Publication series

Name	Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005
Volume	2005

Conference

Conference	Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005
Country/Territory	United Kingdom
City	Oxford
Period	07/10/05 → 07/14/05

Access to Document

10.1109/IVNC.2005.1619491

Cite this

Baylor, L. R., Gardner, W. L., Yang, X., Kasica, R. J., Blalock, B., Durisety, C., Fowlkes, J., Hensley, D. K., Islam, S., Joy, D. C., Melechko, A. V., Rack, P. D., Randolph, S. J., Rucker, R., Thomas, D. K., & Simpson, M. L. (2005). Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept. In Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005 (pp. 74-75). Article 1619491 (Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005; Vol. 2005). https://doi.org/10.1109/IVNC.2005.1619491

@inproceedings{93bf41e80c3b4f4f8859dd71f30f31ba,

title = "Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept",

author = "Baylor, \{L. R.\} and Gardner, \{W. L.\} and X. Yang and Kasica, \{R. J.\} and B. Blalock and C. Durisety and J. Fowlkes and Hensley, \{D. K.\} and S. Islam and Joy, \{D. C.\} and Melechko, \{A. V.\} and Rack, \{P. D.\} and Randolph, \{S. J.\} and R. Rucker and Thomas, \{D. K.\} and Simpson, \{M. L.\}",

year = "2005",

doi = "10.1109/IVNC.2005.1619491",

language = "English",

isbn = "0780383974",

series = "Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005",

pages = "74--75",

booktitle = "Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005",

note = "Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005 ; Conference date: 10-07-2005 Through 14-07-2005",

}

Baylor, LR, Gardner, WL, Yang, X, Kasica, RJ, Blalock, B, Durisety, C, Fowlkes, J, Hensley, DK, Islam, S, Joy, DC, Melechko, AV, Rack, PD, Randolph, SJ, Rucker, R, Thomas, DK & Simpson, ML 2005, Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept. in Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005., 1619491, Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005, vol. 2005, pp. 74-75, Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005, Oxford, United Kingdom, 07/10/05. https://doi.org/10.1109/IVNC.2005.1619491

Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept. / Baylor, L. R.; Gardner, W. L.; Yang, X. et al.
Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005. 2005. p. 74-75 1619491 (Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Baylor, L. R.

AU - Gardner, W. L.

AU - Yang, X.

AU - Kasica, R. J.

AU - Blalock, B.

AU - Durisety, C.

AU - Fowlkes, J.

AU - Hensley, D. K.

AU - Islam, S.

AU - Joy, D. C.

AU - Melechko, A. V.

AU - Rack, P. D.

AU - Randolph, S. J.

AU - Rucker, R.

AU - Thomas, D. K.

AU - Simpson, M. L.

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U2 - 10.1109/IVNC.2005.1619491

DO - 10.1109/IVNC.2005.1619491

M3 - Conference contribution

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SN - 0780383974

SN - 9780780383975

T3 - Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005

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EP - 75

BT - Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005

T2 - Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005

Y2 - 10 July 2005 through 14 July 2005

ER -

Baylor LR, Gardner WL, Yang X, Kasica RJ, Blalock B, Durisety C et al. Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept. In Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005. 2005. p. 74-75. 1619491. (Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005). doi: 10.1109/IVNC.2005.1619491

Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept

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