Process window estimation in manufacturing through Entropy-Sigma active learning

Engineering

• Process Window 100%
• Metrics 66%
• Stability Boundary 33%
• Periodic Sampling 33%
• Time Domain 33%
• Grid-Based Method 33%
• Process Map 33%
• Latin-Hypercube Sampling 33%
• Gaussians 33%
• Parameter Space 33%

Computer Science

• Active Learning 100%
• Hypercube 50%
• Time Domain Simulation 50%
• Identification Problem 50%
• Parameter Space 50%