Probing layered structure of Inconel 625 coatings prepared by magnetron sputtering

Jinghua Feng; Guangcui Yuan; Li Mao; Juscelino B. Leão; Ryan Bedell; Kemal Ramic; Emily de Stefanis; Youyang Zhao; Judith Vidal; Li Liu

doi:10.1016/j.surfcoat.2020.126545

Probing layered structure of Inconel 625 coatings prepared by magnetron sputtering

Jinghua Feng, Guangcui Yuan, Li Mao, Juscelino B. Leão, Ryan Bedell, Kemal Ramic, Emily de Stefanis, Youyang Zhao, Judith Vidal, Li Liu

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

Coating/substrate interface and oxide layers present in Inconel 625 film may cause significant impacts on its corrosion behavior. However, layered structure of Inconel 625 coatings remains poorly understood due to its requirement of high spatial resolution. This study applies X-ray reflectometry (XRR) to probe the layered structure of magnetron-sputtered Inconel 625 film with atomic spatial resolution. Our results indicate that there exists a 2 nm thick Cr-rich Inconel sublayer underneath the principal film. On top of the principal film, it is found a 2 nm thick oxide layer mainly consisting of NiO. In addition, we detected ~2 Å contamination layer on the sapphire substrate, although argon ion sputter cleaning had been applied to the substrate prior to deposition. By comparing the coatings with different deposition time, we observed that the thickness of principal Inconel 625 layer grows linearly with deposition time, with all other layers remaining constant. Our findings provide insight into the layered structures of Inconel 625 coatings with atomic-scale spatial resolution, and provide directions for future efforts that aim to improve the corrosion resistance of Inconel 625 coatings.

Original language	English
Article number	126545
Journal	Surface and Coatings Technology
Volume	405
DOIs	https://doi.org/10.1016/j.surfcoat.2020.126545
State	Published - Jan 15 2021
Externally published	Yes

Funding

This material is based upon work supported by the U.S. Department of Energy's Office of Energy Efficiency and Renewable Energy (EERE) under the Generation 3 Concentrated Solar Power (CSP) Systems award number DE-EE0008380. This work was partially supported by Nuclear Regulatory Commission under the contract NRC-HQ-84-15-G-0018. Certain commercial equipment, instruments, or materials (or suppliers, or software, …) are identified in this paper to foster understanding. The identification of any commercial product or trade name does not imply endorsement or recommendation by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose. This material is based upon work supported by the U.S. Department of Energy's Office of Energy Efficiency and Renewable Energy (EERE) under the Generation 3 Concentrated Solar Power (CSP) Systems award number DE-EE0008380 . This work was partially supported by Nuclear Regulatory Commission under the contract NRC-HQ-84-15-G-0018 . Certain commercial equipment, instruments, or materials (or suppliers, or software, …) are identified in this paper to foster understanding. The identification of any commercial product or trade name does not imply endorsement or recommendation by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.

Funders	Funder number
U.S. Department of Energy
National Institute of Standards and Technology
U.S. Nuclear Regulatory Commission	NRC-HQ-84-15-G-0018
Office of Energy Efficiency and Renewable Energy	DE-EE0008380

Keywords

Coating/substrate interface
Inconel 625 alloy coating
Magnetron sputtering
Oxide layer
X-ray reflectometry

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10.1016/j.surfcoat.2020.126545

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title = "Probing layered structure of Inconel 625 coatings prepared by magnetron sputtering",

abstract = "Coating/substrate interface and oxide layers present in Inconel 625 film may cause significant impacts on its corrosion behavior. However, layered structure of Inconel 625 coatings remains poorly understood due to its requirement of high spatial resolution. This study applies X-ray reflectometry (XRR) to probe the layered structure of magnetron-sputtered Inconel 625 film with atomic spatial resolution. Our results indicate that there exists a 2 nm thick Cr-rich Inconel sublayer underneath the principal film. On top of the principal film, it is found a 2 nm thick oxide layer mainly consisting of NiO. In addition, we detected ~2 {\AA} contamination layer on the sapphire substrate, although argon ion sputter cleaning had been applied to the substrate prior to deposition. By comparing the coatings with different deposition time, we observed that the thickness of principal Inconel 625 layer grows linearly with deposition time, with all other layers remaining constant. Our findings provide insight into the layered structures of Inconel 625 coatings with atomic-scale spatial resolution, and provide directions for future efforts that aim to improve the corrosion resistance of Inconel 625 coatings.",

keywords = "Coating/substrate interface, Inconel 625 alloy coating, Magnetron sputtering, Oxide layer, X-ray reflectometry",

author = "Jinghua Feng and Guangcui Yuan and Li Mao and Le{\~a}o, {Juscelino B.} and Ryan Bedell and Kemal Ramic and {de Stefanis}, Emily and Youyang Zhao and Judith Vidal and Li Liu",

note = "Publisher Copyright: {\textcopyright} 2020 Elsevier B.V.",

year = "2021",

month = jan,

day = "15",

doi = "10.1016/j.surfcoat.2020.126545",

language = "English",

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AU - Feng, Jinghua

AU - Yuan, Guangcui

AU - Mao, Li

AU - Leão, Juscelino B.

AU - Bedell, Ryan

AU - Ramic, Kemal

AU - de Stefanis, Emily

AU - Zhao, Youyang

AU - Vidal, Judith

AU - Liu, Li

PY - 2021/1/15

Y1 - 2021/1/15

N2 - Coating/substrate interface and oxide layers present in Inconel 625 film may cause significant impacts on its corrosion behavior. However, layered structure of Inconel 625 coatings remains poorly understood due to its requirement of high spatial resolution. This study applies X-ray reflectometry (XRR) to probe the layered structure of magnetron-sputtered Inconel 625 film with atomic spatial resolution. Our results indicate that there exists a 2 nm thick Cr-rich Inconel sublayer underneath the principal film. On top of the principal film, it is found a 2 nm thick oxide layer mainly consisting of NiO. In addition, we detected ~2 Å contamination layer on the sapphire substrate, although argon ion sputter cleaning had been applied to the substrate prior to deposition. By comparing the coatings with different deposition time, we observed that the thickness of principal Inconel 625 layer grows linearly with deposition time, with all other layers remaining constant. Our findings provide insight into the layered structures of Inconel 625 coatings with atomic-scale spatial resolution, and provide directions for future efforts that aim to improve the corrosion resistance of Inconel 625 coatings.

AB - Coating/substrate interface and oxide layers present in Inconel 625 film may cause significant impacts on its corrosion behavior. However, layered structure of Inconel 625 coatings remains poorly understood due to its requirement of high spatial resolution. This study applies X-ray reflectometry (XRR) to probe the layered structure of magnetron-sputtered Inconel 625 film with atomic spatial resolution. Our results indicate that there exists a 2 nm thick Cr-rich Inconel sublayer underneath the principal film. On top of the principal film, it is found a 2 nm thick oxide layer mainly consisting of NiO. In addition, we detected ~2 Å contamination layer on the sapphire substrate, although argon ion sputter cleaning had been applied to the substrate prior to deposition. By comparing the coatings with different deposition time, we observed that the thickness of principal Inconel 625 layer grows linearly with deposition time, with all other layers remaining constant. Our findings provide insight into the layered structures of Inconel 625 coatings with atomic-scale spatial resolution, and provide directions for future efforts that aim to improve the corrosion resistance of Inconel 625 coatings.

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Probing layered structure of Inconel 625 coatings prepared by magnetron sputtering

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