Proactive control of the growth behavior of a thermally grown oxide by a chemically vapor deposited Al2O3 layer

Proactive control of the growth behavior of a thermally grown oxide by a chemically vapor deposited Al₂O₃ layer

Y. F. Su, L. F. Allard, D. W. Coffey, W. Y. Lee

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	678-679
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	9
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927603443390
State	Published - 2003

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title = "Proactive control of the growth behavior of a thermally grown oxide by a chemically vapor deposited Al2O3 layer",

author = "Su, {Y. F.} and Allard, {L. F.} and Coffey, {D. W.} and Lee, {W. Y.}",

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AU - Su, Y. F.

AU - Allard, L. F.

AU - Coffey, D. W.

AU - Lee, W. Y.

PY - 2003

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