Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: Structure and mechanical properties

A. Rar; E. D. Specht; H. M. Meyer; M. L. Santella; E. P. George; G. M. Pharr

doi:10.1557/proc-804-jj9.2

Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: Structure and mechanical properties

A. Rar
, E. D. Specht
, H. M. Meyer
, M. L. Santella
, E. P. George
, G. M. Pharr

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.

Original language	English
Pages (from-to)	63-68
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	804
DOIs	https://doi.org/10.1557/proc-804-jj9.2
State	Published - 2003
Event	Combinatorial and Artificial Intelligence Methods in Materials Science II - Boston, MA., United States Duration: Dec 1 2003 → Dec 4 2003

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title = "Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: Structure and mechanical properties",

abstract = "A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.",

author = "A. Rar and Specht, \{E. D.\} and Meyer, \{H. M.\} and Santella, \{M. L.\} and George, \{E. P.\} and Pharr, \{G. M.\}",

year = "2003",

doi = "10.1557/proc-804-jj9.2",

language = "English",

volume = "804",

pages = "63--68",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Combinatorial and Artificial Intelligence Methods in Materials Science II ; Conference date: 01-12-2003 Through 04-12-2003",

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TY - JOUR

T1 - Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion

T2 - Combinatorial and Artificial Intelligence Methods in Materials Science II

AU - Rar, A.

AU - Specht, E. D.

AU - Meyer, H. M.

AU - Santella, M. L.

AU - George, E. P.

AU - Pharr, G. M.

PY - 2003

Y1 - 2003

N2 - A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.

AB - A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.

UR - https://www.scopus.com/pages/publications/2442587373

U2 - 10.1557/proc-804-jj9.2

DO - 10.1557/proc-804-jj9.2

M3 - Conference article

AN - SCOPUS:2442587373

SN - 0272-9172

VL - 804

SP - 63

EP - 68

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

Y2 - 1 December 2003 through 4 December 2003

ER -

Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: Structure and mechanical properties

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