Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: Structure and mechanical properties

A. Rar, E. D. Specht, H. M. Meyer, M. L. Santella, E. P. George, G. M. Pharr

    Research output: Contribution to journalConference articlepeer-review

    2 Scopus citations

    Abstract

    A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.

    Original languageEnglish
    Pages (from-to)63-68
    Number of pages6
    JournalMaterials Research Society Symposium - Proceedings
    Volume804
    DOIs
    StatePublished - 2003
    EventCombinatorial and Artificial Intelligence Methods in Materials Science II - Boston, MA., United States
    Duration: Dec 1 2003Dec 4 2003

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