Porous silicon waveguide with integrated grating coupler for DNA sensing

X. Wei; C. Kang; G. Rong; S. T. Retterer; S. M. Weiss

doi:10.1117/12.809239

Porous silicon waveguide with integrated grating coupler for DNA sensing

X. Wei
, C. Kang
, G. Rong
, S. T. Retterer
, S. M. Weiss

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.

Original language	English
Article number	71670C
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	7167
DOIs	https://doi.org/10.1117/12.809239
State	Published - 2009
Event	Frontiers in Pathogen Detection: From Nanosensors to Systems - San Jose, CA, United States Duration: Jan 24 2009 → Jan 26 2009

Keywords

DNA
Grating
Porous silicon
Waveguide

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10.1117/12.809239

Cite this

@article{325c488060c54f51ab78ff5dc546490f,

title = "Porous silicon waveguide with integrated grating coupler for DNA sensing",

abstract = "A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.",

keywords = "DNA, Grating, Porous silicon, Waveguide",

author = "X. Wei and C. Kang and G. Rong and Retterer, \{S. T.\} and Weiss, \{S. M.\}",

year = "2009",

doi = "10.1117/12.809239",

language = "English",

volume = "7167",

journal = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",

issn = "1605-7422",

note = "Frontiers in Pathogen Detection: From Nanosensors to Systems ; Conference date: 24-01-2009 Through 26-01-2009",

}

TY - JOUR

T1 - Porous silicon waveguide with integrated grating coupler for DNA sensing

AU - Wei, X.

AU - Kang, C.

AU - Rong, G.

AU - Retterer, S. T.

AU - Weiss, S. M.

PY - 2009

Y1 - 2009

N2 - A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.

AB - A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.

KW - DNA

KW - Grating

KW - Porous silicon

KW - Waveguide

UR - https://www.scopus.com/pages/publications/67249151445

U2 - 10.1117/12.809239

DO - 10.1117/12.809239

M3 - Conference article

AN - SCOPUS:67249151445

SN - 1605-7422

VL - 7167

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

M1 - 71670C

T2 - Frontiers in Pathogen Detection: From Nanosensors to Systems

Y2 - 24 January 2009 through 26 January 2009

ER -

Porous silicon waveguide with integrated grating coupler for DNA sensing

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Keywords

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