Pneumatic-less high-speed vacuum meso-pump driven by programmable hydraulics

Jiyoung Son, Hyuntae Kim, Hanseup Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

We present the full testing and characterization results of a pneumatic-less high-speed roughing (vacuum) meso-pump that demonstrates, within our knowledge, the best near-atmosphere performance-up to date while obviating the conventional dependence on pneumatics (e.g. gas cylinders). The roughing pump operates completely all-electrically by manipulating multiple micro membranes utilizing only a single electromagnetic actuator, thus in the smallest packaged volume (22.8cc) of the same kinds while achieving a record vacuum of 206 torr within only 5 minutes. The single actuator operation is enabled by developing programmable micro hydraulics designs where multiple pump membranes were passively-controlled with designed time delays in a desired sequence. The fabricated prototype produced the maximum flow rate of 11.56 sccm at 50 Hz electromagnetic driving frequency; continually operated over 466 hours; and successfully demonstrated the timed actuation of multiple membranes utilizing only a single electromagnetic actuator.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages584-587
Number of pages4
DOIs
StatePublished - 2013
Externally publishedYes
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: Jan 20 2013Jan 24 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/TerritoryTaiwan, Province of China
CityTaipei
Period01/20/1301/24/13

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