TY - GEN
T1 - Pneumatic-less high-speed vacuum meso-pump driven by programmable hydraulics
AU - Son, Jiyoung
AU - Kim, Hyuntae
AU - Kim, Hanseup
PY - 2013
Y1 - 2013
N2 - We present the full testing and characterization results of a pneumatic-less high-speed roughing (vacuum) meso-pump that demonstrates, within our knowledge, the best near-atmosphere performance-up to date while obviating the conventional dependence on pneumatics (e.g. gas cylinders). The roughing pump operates completely all-electrically by manipulating multiple micro membranes utilizing only a single electromagnetic actuator, thus in the smallest packaged volume (22.8cc) of the same kinds while achieving a record vacuum of 206 torr within only 5 minutes. The single actuator operation is enabled by developing programmable micro hydraulics designs where multiple pump membranes were passively-controlled with designed time delays in a desired sequence. The fabricated prototype produced the maximum flow rate of 11.56 sccm at 50 Hz electromagnetic driving frequency; continually operated over 466 hours; and successfully demonstrated the timed actuation of multiple membranes utilizing only a single electromagnetic actuator.
AB - We present the full testing and characterization results of a pneumatic-less high-speed roughing (vacuum) meso-pump that demonstrates, within our knowledge, the best near-atmosphere performance-up to date while obviating the conventional dependence on pneumatics (e.g. gas cylinders). The roughing pump operates completely all-electrically by manipulating multiple micro membranes utilizing only a single electromagnetic actuator, thus in the smallest packaged volume (22.8cc) of the same kinds while achieving a record vacuum of 206 torr within only 5 minutes. The single actuator operation is enabled by developing programmable micro hydraulics designs where multiple pump membranes were passively-controlled with designed time delays in a desired sequence. The fabricated prototype produced the maximum flow rate of 11.56 sccm at 50 Hz electromagnetic driving frequency; continually operated over 466 hours; and successfully demonstrated the timed actuation of multiple membranes utilizing only a single electromagnetic actuator.
UR - http://www.scopus.com/inward/record.url?scp=84875421885&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474309
DO - 10.1109/MEMSYS.2013.6474309
M3 - Conference contribution
AN - SCOPUS:84875421885
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 584
EP - 587
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -