Plasma enhanced chemical vapour deposition of ZrO2 and YSZ coatings

L. J. Espinoza-Pérez; Eddie Lopez-Honorato

doi:10.1080/02670836.2023.2187149

Plasma enhanced chemical vapour deposition of ZrO₂ and YSZ coatings

L. J. Espinoza-Pérez, Eddie Lopez-Honorato

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

YSZ coatings can prevent deleterious thermal effects on thermolabile alloys, however, a challenge is their deposition with a cubic phase at temperatures below 800 °C. In this work, PE-CVD was used to deposit ZrO₂ and YSZ coatings at ∼700 °C, by varying the evaporation temperature, the vol.% O₂, and the substrate position. Our results showed that an evaporation temperature of 200 °C was needed to deposit ZrO₂ coatings. At 700 °C, the tetragonal phase was favoured regardless of the position within the heating zone. At 800 °C with a content of 20–60 vol.% O₂, monoclinic and tetragonal structures were predominant, probably due to an increase in the crystallite size. When the ZrO₂ was dopped with Y₂O₃, a fully cubic structure of ZrO₂ was deposited.

Original language	English
Pages (from-to)	1977-1987
Number of pages	11
Journal	Materials Science and Technology (United Kingdom)
Volume	39
Issue number	15
DOIs	https://doi.org/10.1080/02670836.2023.2187149
State	Published - 2023
Externally published	Yes

Funding

This material is based upon work supported by a grant from the Consejo Nacional de Ciencia y Tecnología (CONACYT, project number: 245629, CONACYT-Horizon2020) and forms part of the European project SAMOFAR (A Paradigm Shift in Reactor Safety with the Molten Salt Fast Reactor). The authors would like to acknowledge CONACYT for the Ph.D. grant awarded to L.J. Espinoza-Pérez. The authors would like to acknowledge CONACYT for the Ph.D. grant awarded to L.J. Espinoza-Pérez.

Keywords

PECVD
YSZ
Zirconia
Zr-acetylacetonate
evaporation temperature
oxygen content
substrate position

Access to Document

10.1080/02670836.2023.2187149

Cite this

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title = "Plasma enhanced chemical vapour deposition of ZrO2 and YSZ coatings",

abstract = "YSZ coatings can prevent deleterious thermal effects on thermolabile alloys, however, a challenge is their deposition with a cubic phase at temperatures below 800 °C. In this work, PE-CVD was used to deposit ZrO2 and YSZ coatings at ∼700 °C, by varying the evaporation temperature, the vol.% O2, and the substrate position. Our results showed that an evaporation temperature of 200 °C was needed to deposit ZrO2 coatings. At 700 °C, the tetragonal phase was favoured regardless of the position within the heating zone. At 800 °C with a content of 20–60 vol.% O2, monoclinic and tetragonal structures were predominant, probably due to an increase in the crystallite size. When the ZrO2 was dopped with Y2O3, a fully cubic structure of ZrO2 was deposited.",

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AB - YSZ coatings can prevent deleterious thermal effects on thermolabile alloys, however, a challenge is their deposition with a cubic phase at temperatures below 800 °C. In this work, PE-CVD was used to deposit ZrO2 and YSZ coatings at ∼700 °C, by varying the evaporation temperature, the vol.% O2, and the substrate position. Our results showed that an evaporation temperature of 200 °C was needed to deposit ZrO2 coatings. At 700 °C, the tetragonal phase was favoured regardless of the position within the heating zone. At 800 °C with a content of 20–60 vol.% O2, monoclinic and tetragonal structures were predominant, probably due to an increase in the crystallite size. When the ZrO2 was dopped with Y2O3, a fully cubic structure of ZrO2 was deposited.

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KW - Zirconia

KW - Zr-acetylacetonate

KW - evaporation temperature

KW - oxygen content

KW - substrate position

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