Piezoresistive detection of acoustic waves

A. Passian; P. G. Evans; V. K. Varma; T. L. Ferrell; T. Thundat

doi:10.1063/1.1532836

Piezoresistive detection of acoustic waves

A. Passian, P. G. Evans, V. K. Varma, T. L. Ferrell, T. Thundat

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

Original language	English
Pages (from-to)	1031-1035
Number of pages	5
Journal	Review of Scientific Instruments
Volume	74
Issue number	2
DOIs	https://doi.org/10.1063/1.1532836
State	Published - Feb 2003

Access to Document

10.1063/1.1532836

Cite this

@article{9a981abc12b34c6ea03cb6895381eb9e,

title = "Piezoresistive detection of acoustic waves",

abstract = "Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.",

author = "A. Passian and Evans, \{P. G.\} and Varma, \{V. K.\} and Ferrell, \{T. L.\} and T. Thundat",

year = "2003",

month = feb,

doi = "10.1063/1.1532836",

language = "English",

volume = "74",

pages = "1031--1035",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "2",

}

TY - JOUR

T1 - Piezoresistive detection of acoustic waves

AU - Passian, A.

AU - Evans, P. G.

AU - Varma, V. K.

AU - Ferrell, T. L.

AU - Thundat, T.

PY - 2003/2

Y1 - 2003/2

N2 - Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

AB - Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

UR - https://www.scopus.com/pages/publications/0037327286

U2 - 10.1063/1.1532836

DO - 10.1063/1.1532836

M3 - Article

AN - SCOPUS:0037327286

SN - 0034-6748

VL - 74

SP - 1031

EP - 1035

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 2

ER -

Piezoresistive detection of acoustic waves

Abstract

Access to Document

Other files and links

Fingerprint

Cite this