Abstract
Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.
Original language | English |
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Pages (from-to) | 1031-1035 |
Number of pages | 5 |
Journal | Review of Scientific Instruments |
Volume | 74 |
Issue number | 2 |
DOIs | |
State | Published - Feb 2003 |