Piezoresistive detection of acoustic waves

A. Passian, P. G. Evans, V. K. Varma, T. L. Ferrell, T. Thundat

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

Original languageEnglish
Pages (from-to)1031-1035
Number of pages5
JournalReview of Scientific Instruments
Volume74
Issue number2
DOIs
StatePublished - Feb 2003

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