Piezoelectric Actuation of Graphene-Coated Polar Structures

Andrei L. Kholkin; Andrei D. Ushakov; Maria A. Chuvakova; Mikhail S. Kosobokov; Andrey R. Akhmatkhanov; Andrei V. Turutin; Maxim V. Chichkov; Ivan I. Kravchenko; Yakov Kopelevich; Vladimir Ya Shur

doi:10.1109/TUFFC.2020.2998976

Piezoelectric Actuation of Graphene-Coated Polar Structures

Andrei L. Kholkin, Andrei D. Ushakov, Maria A. Chuvakova, Mikhail S. Kosobokov, Andrey R. Akhmatkhanov, Andrei V. Turutin, Maxim V. Chichkov, Ivan I. Kravchenko, Yakov Kopelevich, Vladimir Ya Shur

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Ferroelectric materials based on lead zirconate titanate (PZT) are widely used as sensors and actuators because of their strong piezoelectric activity. However, their application is limited because of the high processing temperature, brittleness, lack of conformal deposition, and a limited possibility to be integrated with the microelectromechanical systems (MEMS). Recent studies on the piezoelectricity in the 2-D materials have demonstrated their potential in these applications, essentially due to their flexibility and integrability with the MEMS. In this work, we deposited a few layer graphene (FLG) on the amorphous oxidized Si3N4 membranes and studied their piezoelectric response by sensitive laser interferometry and rigorous finite-element modeling (FEM) analysis. Modal analysis by FEM and comparison with the experimental results show that the driving force for the piezoelectric-like response can be a polar interface layer formed between the residual oxygen in Si3N4 and the FLG. The response was about 14 nm/V at resonance and could be further enhanced by adjusting the geometry of the device. These phenomena are fully consistent with the earlier piezoresponse force microscopy (PFM) observations of the piezoelectricity of the graphene on SiO2 and open up an avenue for using graphene-coated structures in the MEMS.

Original language	English
Article number	9107107
Pages (from-to)	2142-2147
Number of pages	6
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	67
Issue number	10
DOIs	https://doi.org/10.1109/TUFFC.2020.2998976
State	Published - Oct 2020

Funding

Manuscript received December 5, 2019; accepted May 22, 2020. Date of publication June 3, 2020; date of current version September 25, 2020. This work was supported in part by the Russian Foundation for Fundamental Research under Grant 16-29-14050, in part by the Ministry of Education and Science of the Russian Federation in the frame-work of the Increase Competitiveness Program of MISiS under Grant K2-2019-015, in part by the Project CICECO-Aveiro Institute of Materials financed by national funds through the Portuguese Foundation for Science and Technology/MCTES under Grants UIDB/50011/2020 and UIDP/50011/2020, and in part by the Center for Nanophase Materials Sciences, which is a Department of Energy Office of Science User Facility. The work was also supported by Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006) and by the Ministry of Science and Higher Education of the Russian Federation (state task FEUZ-2020-0054). The equipment of the Ural Center for Shared Use “Modern nanotechnology” UrFU was used. The work of Yakov Kopele-vich was supported in part by Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq) and in part by the Fundação de Amparo à Pesquisa do Estado de S. Paulo (FAPESP) (Brazil). (Corresponding author: Andrei L. Kholkin.) Andrei L. Kholkin is with the Department of Physics and CICECO— Aveiro Institute of Materials, University of Aveiro, 3810-193 Aveiro, Portugal (e-mail: [email protected]).

Keywords

Finite-element analysis
graphene
membrane
piezoelectricity
resonance

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10.1109/TUFFC.2020.2998976

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Kholkin, A. L., Ushakov, A. D., Chuvakova, M. A., Kosobokov, M. S., Akhmatkhanov, A. R., Turutin, A. V., Chichkov, M. V., Kravchenko, I. I., Kopelevich, Y., & Shur, V. Y. (2020). Piezoelectric Actuation of Graphene-Coated Polar Structures. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(10), 2142-2147. Article 9107107. https://doi.org/10.1109/TUFFC.2020.2998976

@article{c3ef627713154cfa9c04a51746f76ca4,

title = "Piezoelectric Actuation of Graphene-Coated Polar Structures",

abstract = "Ferroelectric materials based on lead zirconate titanate (PZT) are widely used as sensors and actuators because of their strong piezoelectric activity. However, their application is limited because of the high processing temperature, brittleness, lack of conformal deposition, and a limited possibility to be integrated with the microelectromechanical systems (MEMS). Recent studies on the piezoelectricity in the 2-D materials have demonstrated their potential in these applications, essentially due to their flexibility and integrability with the MEMS. In this work, we deposited a few layer graphene (FLG) on the amorphous oxidized Si3N4 membranes and studied their piezoelectric response by sensitive laser interferometry and rigorous finite-element modeling (FEM) analysis. Modal analysis by FEM and comparison with the experimental results show that the driving force for the piezoelectric-like response can be a polar interface layer formed between the residual oxygen in Si3N4 and the FLG. The response was about 14 nm/V at resonance and could be further enhanced by adjusting the geometry of the device. These phenomena are fully consistent with the earlier piezoresponse force microscopy (PFM) observations of the piezoelectricity of the graphene on SiO2 and open up an avenue for using graphene-coated structures in the MEMS.",

keywords = "Finite-element analysis, graphene, membrane, piezoelectricity, resonance",

author = "Kholkin, {Andrei L.} and Ushakov, {Andrei D.} and Chuvakova, {Maria A.} and Kosobokov, {Mikhail S.} and Akhmatkhanov, {Andrey R.} and Turutin, {Andrei V.} and Chichkov, {Maxim V.} and Kravchenko, {Ivan I.} and Yakov Kopelevich and Shur, {Vladimir Ya}",

note = "Publisher Copyright: {\textcopyright} 1986-2012 IEEE.",

year = "2020",

month = oct,

doi = "10.1109/TUFFC.2020.2998976",

language = "English",

volume = "67",

pages = "2142--2147",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers",

number = "10",

}

TY - JOUR

T1 - Piezoelectric Actuation of Graphene-Coated Polar Structures

AU - Kholkin, Andrei L.

AU - Ushakov, Andrei D.

AU - Chuvakova, Maria A.

AU - Kosobokov, Mikhail S.

AU - Akhmatkhanov, Andrey R.

AU - Turutin, Andrei V.

AU - Chichkov, Maxim V.

AU - Kravchenko, Ivan I.

AU - Kopelevich, Yakov

AU - Shur, Vladimir Ya

PY - 2020/10

Y1 - 2020/10

N2 - Ferroelectric materials based on lead zirconate titanate (PZT) are widely used as sensors and actuators because of their strong piezoelectric activity. However, their application is limited because of the high processing temperature, brittleness, lack of conformal deposition, and a limited possibility to be integrated with the microelectromechanical systems (MEMS). Recent studies on the piezoelectricity in the 2-D materials have demonstrated their potential in these applications, essentially due to their flexibility and integrability with the MEMS. In this work, we deposited a few layer graphene (FLG) on the amorphous oxidized Si3N4 membranes and studied their piezoelectric response by sensitive laser interferometry and rigorous finite-element modeling (FEM) analysis. Modal analysis by FEM and comparison with the experimental results show that the driving force for the piezoelectric-like response can be a polar interface layer formed between the residual oxygen in Si3N4 and the FLG. The response was about 14 nm/V at resonance and could be further enhanced by adjusting the geometry of the device. These phenomena are fully consistent with the earlier piezoresponse force microscopy (PFM) observations of the piezoelectricity of the graphene on SiO2 and open up an avenue for using graphene-coated structures in the MEMS.

AB - Ferroelectric materials based on lead zirconate titanate (PZT) are widely used as sensors and actuators because of their strong piezoelectric activity. However, their application is limited because of the high processing temperature, brittleness, lack of conformal deposition, and a limited possibility to be integrated with the microelectromechanical systems (MEMS). Recent studies on the piezoelectricity in the 2-D materials have demonstrated their potential in these applications, essentially due to their flexibility and integrability with the MEMS. In this work, we deposited a few layer graphene (FLG) on the amorphous oxidized Si3N4 membranes and studied their piezoelectric response by sensitive laser interferometry and rigorous finite-element modeling (FEM) analysis. Modal analysis by FEM and comparison with the experimental results show that the driving force for the piezoelectric-like response can be a polar interface layer formed between the residual oxygen in Si3N4 and the FLG. The response was about 14 nm/V at resonance and could be further enhanced by adjusting the geometry of the device. These phenomena are fully consistent with the earlier piezoresponse force microscopy (PFM) observations of the piezoelectricity of the graphene on SiO2 and open up an avenue for using graphene-coated structures in the MEMS.

KW - Finite-element analysis

KW - graphene

KW - membrane

KW - piezoelectricity

KW - resonance

UR - http://www.scopus.com/inward/record.url?scp=85091808844&partnerID=8YFLogxK

U2 - 10.1109/TUFFC.2020.2998976

DO - 10.1109/TUFFC.2020.2998976

M3 - Article

C2 - 32746170

AN - SCOPUS:85091808844

SN - 0885-3010

VL - 67

SP - 2142

EP - 2147

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 10

M1 - 9107107

ER -

Piezoelectric Actuation of Graphene-Coated Polar Structures

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