TY - GEN
T1 - Photonic devices in low-temperature laser-crystallized deposited silicon
AU - Preston, Kyle
AU - Poitras, Carl B.
AU - Thompson, Michael O.
AU - Lipson, Micha
PY - 2010
Y1 - 2010
N2 - We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.
AB - We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.
UR - https://www.scopus.com/pages/publications/84894053150
M3 - Conference contribution
AN - SCOPUS:84894053150
SN - 9781557528896
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics, CLEO 2010
T2 - Conference on Lasers and Electro-Optics, CLEO 2010
Y2 - 16 May 2010 through 21 May 2010
ER -