TY - GEN
T1 - Photonic devices in low-temperature laser-crystallized deposited silicon
AU - Preston, Kyle
AU - Poitras, Carl B.
AU - Thompson, Michael O.
AU - Lipson, Michal
PY - 2010
Y1 - 2010
N2 - We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.
AB - We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.
UR - https://www.scopus.com/pages/publications/77957588350
M3 - Conference contribution
AN - SCOPUS:77957588350
SN - 9781557528902
T3 - Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
BT - Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
T2 - Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Y2 - 16 May 2010 through 21 May 2010
ER -