Photonic crystal nanobeam biosensors based on porous silicon

Gilberto A. Rodriguez; Petr Markov; Alyssa P. Cartwright; Moinul H. Choudhury; Francis O. Afzal; Tengfei Cao; Sami I. Halimi; Scott T. Retterer; Ivan I. Kravchenko; Sharon M. Weiss

doi:10.1364/OE.27.009536

Photonic crystal nanobeam biosensors based on porous silicon

Gilberto A. Rodriguez, Petr Markov, Alyssa P. Cartwright, Moinul H. Choudhury, Francis O. Afzal, Tengfei Cao, Sami I. Halimi, Scott T. Retterer, Ivan I. Kravchenko, Sharon M. Weiss

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

Photonic crystal (PhC) nanobeams (NB) patterned on porous silicon (PSi) waveguide substrates are demonstrated for the specific, label-free detection of oligonucleotides. These photonic structures combine the large active sensing area intrinsic to PSi sensors with the high-quality (Q) factor and low-mode volume characteristic of compact resonant silicon-on-insulator (SOI) PhC NB devices. The PSi PhC NB can achieve a Q-factor near 9,000 and has an approximately 40-fold increased active sensing area for molecular attachment, compared to traditional SOI PhC NB sensors. The PSi PhC NB exhibits a resonance shift that is more than one order of magnitude larger than that of a similarly designed SOI PhC NB for the detection of small chemical molecules and 16-base peptide nucleic acids. The design and fabrication of PSi PhC NB sensors are compatible with CMOS processing, sensor arrays, and integration with lab-on-chip systems.

Original language	English
Pages (from-to)	9536-9549
Number of pages	14
Journal	Optics Express
Volume	27
Issue number	7
DOIs	https://doi.org/10.1364/OE.27.009536
State	Published - Apr 1 2019

Funding

Army Research Office (W911NF-09-1-0101, W911NF-15-1-0176); National Science Foundation (ECCS1407777); National Science Foundation, Research Experiences for Undergraduates Program (DMR-1263182); National Science Foundation Graduate Research Fellowship (F. O. Afzal). Army Research Office (W911NF-09-1-0101, W911NF-15-1-0176); National Science Foundation (ECCS1407777); National Science Foundation, Research Experiences for Undergraduates Program (DMR-1263182); National Science Foundation Graduate Research Fellowship (F. O. Afzal). Electron beam lithography and reactive ion etching were conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility. SEM imaging was carried out in the Vanderbilt Institute of Nanoscale Science and Engineering. The authors thank Kelsey Beavers for her assistance with the biosensing experiments.

Funders	Funder number
National Science Foundation	DMR-1263182, ECCS1407777
Army Research Office	W911NF-15-1-0176, W911NF-09-1-0101
National Science Foundation

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title = "Photonic crystal nanobeam biosensors based on porous silicon",

abstract = "Photonic crystal (PhC) nanobeams (NB) patterned on porous silicon (PSi) waveguide substrates are demonstrated for the specific, label-free detection of oligonucleotides. These photonic structures combine the large active sensing area intrinsic to PSi sensors with the high-quality (Q) factor and low-mode volume characteristic of compact resonant silicon-on-insulator (SOI) PhC NB devices. The PSi PhC NB can achieve a Q-factor near 9,000 and has an approximately 40-fold increased active sensing area for molecular attachment, compared to traditional SOI PhC NB sensors. The PSi PhC NB exhibits a resonance shift that is more than one order of magnitude larger than that of a similarly designed SOI PhC NB for the detection of small chemical molecules and 16-base peptide nucleic acids. The design and fabrication of PSi PhC NB sensors are compatible with CMOS processing, sensor arrays, and integration with lab-on-chip systems.",

author = "Rodriguez, {Gilberto A.} and Petr Markov and Cartwright, {Alyssa P.} and Choudhury, {Moinul H.} and Afzal, {Francis O.} and Tengfei Cao and Halimi, {Sami I.} and Retterer, {Scott T.} and Kravchenko, {Ivan I.} and Weiss, {Sharon M.}",

note = "Publisher Copyright: {\textcopyright} 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement",

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doi = "10.1364/OE.27.009536",

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AU - Markov, Petr

AU - Cartwright, Alyssa P.

AU - Choudhury, Moinul H.

AU - Afzal, Francis O.

AU - Cao, Tengfei

AU - Halimi, Sami I.

AU - Retterer, Scott T.

AU - Kravchenko, Ivan I.

AU - Weiss, Sharon M.

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AB - Photonic crystal (PhC) nanobeams (NB) patterned on porous silicon (PSi) waveguide substrates are demonstrated for the specific, label-free detection of oligonucleotides. These photonic structures combine the large active sensing area intrinsic to PSi sensors with the high-quality (Q) factor and low-mode volume characteristic of compact resonant silicon-on-insulator (SOI) PhC NB devices. The PSi PhC NB can achieve a Q-factor near 9,000 and has an approximately 40-fold increased active sensing area for molecular attachment, compared to traditional SOI PhC NB sensors. The PSi PhC NB exhibits a resonance shift that is more than one order of magnitude larger than that of a similarly designed SOI PhC NB for the detection of small chemical molecules and 16-base peptide nucleic acids. The design and fabrication of PSi PhC NB sensors are compatible with CMOS processing, sensor arrays, and integration with lab-on-chip systems.

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Photonic crystal nanobeam biosensors based on porous silicon

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