Photoemission extended fine structure study of the SiO2/Si(111) interface

M. T. Sieger, D. A. Luh, T. Miller, T. C. Chiang

Research output: Contribution to journalArticlepeer-review

60 Scopus citations

Abstract

High-resolution Si 2p core level photoemission spectra of the SiO2/Si(111) system show chemically shifted components derived from individual oxidation states, which exhibit strong intensity modulations as a function of photon energy due to final-state diffraction. Analysis of these photoemission intensity modulations gives bond-length information specific to the individual suboxide. The results indicate that the interface is atomically abrupt.

Original languageEnglish
Pages (from-to)2758-2761
Number of pages4
JournalPhysical Review Letters
Volume77
Issue number13
DOIs
StatePublished - 1996
Externally publishedYes

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