Phase separation and Si nanocrystal formation in bulk SiO studied by x-ray scattering

  • O. M. Feroughi
  • , C. Sternemann
  • , Ch J. Sahle
  • , M. A. Schroer
  • , H. Sternemann
  • , H. Conrad
  • , A. Hohl
  • , G. T. Seidler
  • , J. Bradley
  • , T. T. Fister
  • , M. Balasubramanian
  • , A. Sakko
  • , K. Pirkkalainen
  • , K. Hämäläinen
  • , M. Tolan

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

We present an x-ray scattering study of the temperature-induced phase separation and Si nanocrystal formation in bulk amorphous SiOx with x≈1. X-ray Raman scattering at the Si LII,III -edge reveals a significant contribution of suboxides present in native amorphous SiO. The suboxide contribution decreases with increasing annealing temperature between 800-1200 °C pointing toward a phase separation of SiO into Si and SiO2 domains. In combination with x-ray diffraction and small angle x-ray scattering the SiO microstructure is found to be dominated by internal suboxide interfaces in the native state. For higher annealing temperatures above 900 °C growth of Si nanocrystals with rough surfaces embedded in a silicon oxide matrix can be observed.

Original languageEnglish
Article number081912
JournalApplied Physics Letters
Volume96
Issue number8
DOIs
StatePublished - 2010

Funding

The authors would like to acknowledge APS and DELTA for providing synchrotron radiation. This work was supported by DAAD (Grant Nos. 313-PPP-SF/08-IK and 1127504), DFG (Grant No. TO 169/14-1) and the Academy of Finland (Grant Nos. 1110571 and 1127462).

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