Abstract
We present an x-ray scattering study of the temperature-induced phase separation and Si nanocrystal formation in bulk amorphous SiOx with x≈1. X-ray Raman scattering at the Si LII,III -edge reveals a significant contribution of suboxides present in native amorphous SiO. The suboxide contribution decreases with increasing annealing temperature between 800-1200 °C pointing toward a phase separation of SiO into Si and SiO2 domains. In combination with x-ray diffraction and small angle x-ray scattering the SiO microstructure is found to be dominated by internal suboxide interfaces in the native state. For higher annealing temperatures above 900 °C growth of Si nanocrystals with rough surfaces embedded in a silicon oxide matrix can be observed.
| Original language | English |
|---|---|
| Article number | 081912 |
| Journal | Applied Physics Letters |
| Volume | 96 |
| Issue number | 8 |
| DOIs | |
| State | Published - 2010 |
Funding
The authors would like to acknowledge APS and DELTA for providing synchrotron radiation. This work was supported by DAAD (Grant Nos. 313-PPP-SF/08-IK and 1127504), DFG (Grant No. TO 169/14-1) and the Academy of Finland (Grant Nos. 1110571 and 1127462).