Performance of uncooled microcantilever thermal detectors

P. G. Datskos; N. V. Lavrik; S. Rajic

doi:10.1063/1.1667257

Performance of uncooled microcantilever thermal detectors

P. G. Datskos, N. V. Lavrik, S. Rajic

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

162 Scopus citations

Abstract

Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.

Original language	English
Pages (from-to)	1134-1148
Number of pages	15
Journal	Review of Scientific Instruments
Volume	75
Issue number	4
DOIs	https://doi.org/10.1063/1.1667257
State	Published - Apr 2004

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title = "Performance of uncooled microcantilever thermal detectors",

abstract = "Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.",

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N2 - Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.

AB - Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.

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JO - Review of Scientific Instruments

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Performance of uncooled microcantilever thermal detectors

Abstract

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