Performance of uncooled microcantilever thermal detectors

P. G. Datskos; S. Rajic; N. V. Lavrik

doi:10.1117/12.590823

Performance of uncooled microcantilever thermal detectors

P. G. Datskos, S. Rajic, N. V. Lavrik

Nanofabrication Research Laboratory

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a performance analysis for microcantilever IR detectors with an optical readout. We discuss responsivity of microcantilever IR detectors and analyze the different sources (and mechanisms) of noise present in them. A model SiN_x microcantilever device with an Al layer in the bimaterial region was fabricated and its performance as an IR detector was analyzed.

Original language	English
Article number	17
Pages (from-to)	136-150
Number of pages	15
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5721
DOIs	https://doi.org/10.1117/12.590823
State	Published - 2005
Event	MOEMS Display and Imaging Systems III - San Jose, CA, United States Duration: Jan 24 2005 → Jan 25 2005

Keywords

Focal place array
IR detector
MEMS
NETD
Noise
Responsivity
Thermal detector
Thermal isolation

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10.1117/12.590823

Cite this

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title = "Performance of uncooled microcantilever thermal detectors",

abstract = "Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a performance analysis for microcantilever IR detectors with an optical readout. We discuss responsivity of microcantilever IR detectors and analyze the different sources (and mechanisms) of noise present in them. A model SiNx microcantilever device with an Al layer in the bimaterial region was fabricated and its performance as an IR detector was analyzed.",

keywords = "Focal place array, IR detector, MEMS, NETD, Noise, Responsivity, Thermal detector, Thermal isolation",

author = "Datskos, \{P. G.\} and S. Rajic and Lavrik, \{N. V.\}",

year = "2005",

doi = "10.1117/12.590823",

language = "English",

volume = "5721",

pages = "136--150",

journal = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",

issn = "1605-7422",

note = "MOEMS Display and Imaging Systems III ; Conference date: 24-01-2005 Through 25-01-2005",

}

TY - JOUR

T1 - Performance of uncooled microcantilever thermal detectors

AU - Datskos, P. G.

AU - Rajic, S.

AU - Lavrik, N. V.

PY - 2005

Y1 - 2005

N2 - Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a performance analysis for microcantilever IR detectors with an optical readout. We discuss responsivity of microcantilever IR detectors and analyze the different sources (and mechanisms) of noise present in them. A model SiNx microcantilever device with an Al layer in the bimaterial region was fabricated and its performance as an IR detector was analyzed.

AB - Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a performance analysis for microcantilever IR detectors with an optical readout. We discuss responsivity of microcantilever IR detectors and analyze the different sources (and mechanisms) of noise present in them. A model SiNx microcantilever device with an Al layer in the bimaterial region was fabricated and its performance as an IR detector was analyzed.

KW - Focal place array

KW - IR detector

KW - MEMS

KW - NETD

KW - Noise

KW - Responsivity

KW - Thermal detector

KW - Thermal isolation

UR - https://www.scopus.com/pages/publications/21844435228

U2 - 10.1117/12.590823

DO - 10.1117/12.590823

M3 - Conference article

AN - SCOPUS:21844435228

SN - 1605-7422

VL - 5721

SP - 136

EP - 150

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

M1 - 17

T2 - MOEMS Display and Imaging Systems III

Y2 - 24 January 2005 through 25 January 2005

ER -

Performance of uncooled microcantilever thermal detectors

Abstract

Keywords

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