Performance of uncooled microcantilever thermal detectors

P. G. Datskos; N. V. Lavrik; S. Rajic

doi:10.1063/1.1667257

Performance of uncooled microcantilever thermal detectors

P. G. Datskos, N. V. Lavrik, S. Rajic

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

159 Scopus citations

Abstract

Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.

Original language	English
Pages (from-to)	1134-1148
Number of pages	15
Journal	Review of Scientific Instruments
Volume	75
Issue number	4
DOIs	https://doi.org/10.1063/1.1667257
State	Published - Apr 2004

Access to Document

10.1063/1.1667257

Cite this

@article{a78b87d506684e5888ffd8768cde0297,

title = "Performance of uncooled microcantilever thermal detectors",

abstract = "Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.",

author = "Datskos, {P. G.} and Lavrik, {N. V.} and S. Rajic",

year = "2004",

month = apr,

doi = "10.1063/1.1667257",

language = "English",

volume = "75",

pages = "1134--1148",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "4",

}

TY - JOUR

T1 - Performance of uncooled microcantilever thermal detectors

AU - Datskos, P. G.

AU - Lavrik, N. V.

AU - Rajic, S.

PY - 2004/4

Y1 - 2004/4

N2 - Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.

AB - Uncooled microcantilever thermal detectors have the potential to achieve NETD values already demonstrated by other uncooled thermal detectors and achieve sensitivity levels of resistive microbridge bolometers. The models provide a clear guidance for designing and fabricating microcantilever thermal detectors that are limited mainly by temperature fluctuation noise.

UR - http://www.scopus.com/inward/record.url?scp=2042449118&partnerID=8YFLogxK

U2 - 10.1063/1.1667257

DO - 10.1063/1.1667257

M3 - Article

AN - SCOPUS:2042449118

SN - 0034-6748

VL - 75

SP - 1134

EP - 1148

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 4

ER -

Performance of uncooled microcantilever thermal detectors

Abstract

Access to Document

Other files and links

Fingerprint

Cite this