PECVD synthesis of Si nanowires

I. I. Kravchenko

PECVD synthesis of Si nanowires

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Silicon nanowires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common (for an average nanofabrication facility) plasma equipment set that did not require special modifications. Further studies are needed to improve the synthesis process parameters and gold catalyst particle distribution.

Original language	English
Title of host publication	Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008
Pages	623-625
Number of pages	3
State	Published - 2008
Externally published	Yes
Event	2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 - Quebec City, QC, United States Duration: Jun 1 2008 → Jun 5 2008

Publication series

Name	Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008
Volume	1

Conference

Conference	2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008
Country/Territory	United States
City	Quebec City, QC
Period	06/1/08 → 06/5/08

Keywords

Gold catalyst
Nano-particle
PECVD
Si nano-wire

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{02d068b35d464e73b4a32a560358c171,

title = "PECVD synthesis of Si nanowires",

abstract = "Silicon nanowires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common (for an average nanofabrication facility) plasma equipment set that did not require special modifications. Further studies are needed to improve the synthesis process parameters and gold catalyst particle distribution.",

keywords = "Gold catalyst, Nano-particle, PECVD, Si nano-wire",

author = "Kravchenko, {I. I.}",

year = "2008",

language = "English",

isbn = "9781420085075",

series = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",

pages = "623--625",

booktitle = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",

note = "2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 ; Conference date: 01-06-2008 Through 05-06-2008",

}

Kravchenko, II 2008, PECVD synthesis of Si nanowires. in Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008. Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008, vol. 1, pp. 623-625, 2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008, Quebec City, QC, United States, 06/1/08.

PECVD synthesis of Si nanowires. / Kravchenko, I. I.
Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008. 2008. p. 623-625 (Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - PECVD synthesis of Si nanowires

AU - Kravchenko, I. I.

PY - 2008

Y1 - 2008

N2 - Silicon nanowires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common (for an average nanofabrication facility) plasma equipment set that did not require special modifications. Further studies are needed to improve the synthesis process parameters and gold catalyst particle distribution.

AB - Silicon nanowires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common (for an average nanofabrication facility) plasma equipment set that did not require special modifications. Further studies are needed to improve the synthesis process parameters and gold catalyst particle distribution.

KW - Gold catalyst

KW - Nano-particle

KW - PECVD

KW - Si nano-wire

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M3 - Conference contribution

AN - SCOPUS:53349140935

SN - 9781420085075

SN - 9781420085037

T3 - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008

SP - 623

EP - 625

BT - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008

T2 - 2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008

Y2 - 1 June 2008 through 5 June 2008

ER -

PECVD synthesis of Si nanowires

Abstract

Publication series

Conference

Keywords

UN SDGs

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