Passivation of AlN/GaN high electron mobility transistor using ozone treatment

  • C. F. Lo
  • , C. Y. Chang
  • , S. J. Pearton
  • , I. I. Kravchenko
  • , A. M. Dabiran
  • , A. M. Wowchak
  • , B. Cui
  • , P. P. Chow
  • , F. Ren

    Research output: Contribution to journal › Article › peer-review

    4 Scopus citations

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