Packaging of silicon carbide power semiconductor devices

Simon S. Ang, William D. Brown, Habib Mustain, Brian Rowden, Juan C. Balda, Alan Mantooth

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The packaging of silicon carbide (SiC) power semiconductor devices was investigated. SiC dice were attached to a direct bond copper substrate using Sn96.5-Ag3.5 solder. Using a transient liquid bonding technique, SiC dice were brazed to the silicon nitride substrate with Ag74.2-In25.8 and Au76-In24 solders. No degradation of these solder joints were noted after thermal storage at 400°C for 100 hours.

Original languageEnglish
Title of host publicationSemiconductor Technology, ISTC 2008 - Proceedings of the 7th International Conference on Semiconductor Technology
Pages604-609
Number of pages6
StatePublished - 2008
Externally publishedYes
Event7th International Conference on Semiconductor Technology, ISTC 2008 - Shanghai, China
Duration: Mar 15 2008Mar 17 2008

Publication series

NameProceedings - Electrochemical Society
VolumePV 2008-1

Conference

Conference7th International Conference on Semiconductor Technology, ISTC 2008
Country/TerritoryChina
CityShanghai
Period03/15/0803/17/08

Keywords

  • High-temperature die attach
  • Power semiconductor packaging
  • Silicon carbide
  • Silicon nitride substrate
  • Transient liquid phase bonding

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