Origin of atomic clusters during ion sputtering

L. E. Rehn; R. C. Birtcher; S. E. Donnelly; P. M. Baldo; L. Funk

doi:10.1103/PhysRevLett.87.207601

Origin of atomic clusters during ion sputtering

L. E. Rehn
, R. C. Birtcher
, S. E. Donnelly
, P. M. Baldo
, L. Funk

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Previous studies have shown that the size distributions of small clusters (n ≤ 40; n = number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters (n ≥ 500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

Original language	English
Pages (from-to)	207601-1-207601-4
Journal	Physical Review Letters
Volume	87
Issue number	20
DOIs	https://doi.org/10.1103/PhysRevLett.87.207601
State	Published - Nov 12 2001
Externally published	Yes

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10.1103/PhysRevLett.87.207601

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title = "Origin of atomic clusters during ion sputtering",

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AU - Rehn, L. E.

AU - Birtcher, R. C.

AU - Donnelly, S. E.

AU - Baldo, P. M.

AU - Funk, L.

PY - 2001/11/12

Y1 - 2001/11/12

N2 - Previous studies have shown that the size distributions of small clusters (n ≤ 40; n = number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters (n ≥ 500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

AB - Previous studies have shown that the size distributions of small clusters (n ≤ 40; n = number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters (n ≥ 500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

UR - https://www.scopus.com/pages/publications/85037254501

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DO - 10.1103/PhysRevLett.87.207601

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SP - 207601-1-207601-4

JO - Physical Review Letters

JF - Physical Review Letters

IS - 20

ER -

Origin of atomic clusters during ion sputtering

Abstract

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