TY - JOUR
T1 - Optimization of chemical vapor deposition parameters for fabrication of oxidation-resistant mullite coatings on silicon nitride
AU - Zemskova, Svetlana M.
AU - Jones, Camille Y.
AU - Cooley, Kevin M.
AU - Haynes, J. Allen
PY - 2004/12
Y1 - 2004/12
N2 - Fabrication of mullite (3Al2O3·2SiO 2) coatings by chemical vapor deposition (CVD) using AlCl 3-SiCl4-H2-CO2 gas mixtures was studied. The resultant CVD mullite coating microstructures were sensitive to gas-phase composition and deposition temperature. Chemical thermodynamic calculations performed on the AlCl3-SiCl4-H 2-CO2 system were used to predict an equilibrium CVD phase diagram. Results from the thermodynamic analysis, process optimization, and effects of various process parameters on coating morphology are discussed. Dense, adherent crystalline CVD mullite coatings ∼2 μm thick were successfully grown on Si3N4 substrates at 1000°C and 10.7 kPa total pressure. The resultant coatings were 001 textured and contained well-faceted grains ∼0.3-0.5 μm in size.
AB - Fabrication of mullite (3Al2O3·2SiO 2) coatings by chemical vapor deposition (CVD) using AlCl 3-SiCl4-H2-CO2 gas mixtures was studied. The resultant CVD mullite coating microstructures were sensitive to gas-phase composition and deposition temperature. Chemical thermodynamic calculations performed on the AlCl3-SiCl4-H 2-CO2 system were used to predict an equilibrium CVD phase diagram. Results from the thermodynamic analysis, process optimization, and effects of various process parameters on coating morphology are discussed. Dense, adherent crystalline CVD mullite coatings ∼2 μm thick were successfully grown on Si3N4 substrates at 1000°C and 10.7 kPa total pressure. The resultant coatings were 001 textured and contained well-faceted grains ∼0.3-0.5 μm in size.
UR - http://www.scopus.com/inward/record.url?scp=12144265164&partnerID=8YFLogxK
U2 - 10.1111/j.1151-2916.2004.tb07491.x
DO - 10.1111/j.1151-2916.2004.tb07491.x
M3 - Article
AN - SCOPUS:12144265164
SN - 0002-7820
VL - 87
SP - 2201
EP - 2207
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 12
ER -