Optical thin-film interference effects in microcantilevers

A. Wig, A. Passian, E. Arakawa, T. L. Ferrell, T. Thundat

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

Thin-film interference effects were observed as deflections in the microcantilevers. As such, theoretical results show a good correlation with the experimental results. The results demonstrate how the optical activation of microcantilevers can be improved quantitatively through the use of specific thicknesses of layered materials. This understanding should lead to improved microcantilever sensor design.

Original languageEnglish
Pages (from-to)1162-1165
Number of pages4
JournalJournal of Applied Physics
Volume95
Issue number3
DOIs
StatePublished - Feb 1 2004

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