Abstract
Thin-film interference effects were observed as deflections in the microcantilevers. As such, theoretical results show a good correlation with the experimental results. The results demonstrate how the optical activation of microcantilevers can be improved quantitatively through the use of specific thicknesses of layered materials. This understanding should lead to improved microcantilever sensor design.
Original language | English |
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Pages (from-to) | 1162-1165 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 95 |
Issue number | 3 |
DOIs | |
State | Published - Feb 1 2004 |