Optical spatial heterodyned interferometry for inspection of micro-electro-mechanical systems

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Interferometric imaging has the potential to extend the usefulness of optical microscopes by encoding small phase shifts that reveal information about topology and materials. At the Oak Ridge National Laboratory (ORNL), we have developed an optical Spatial Heterodyne Interferometry (SHI) method that captures reflection images containing both phase and amplitude information at a high rate of speed. By measuring the phase of a wavefront reflected off or transmitted through a surface, the relative surface heights and some materials properties can be measured. In this paper we briefly review our historical application of SHI in the semiconductor industry, but the focus is on new research to adapt this technology to the inspection of MEMS devices, in particular to the characterization of motion elements such as microcantilevers and deformable mirror arrays.

Original languageEnglish
Title of host publicationEighth International Conference on Quality Control by Artificial Vision
DOIs
StatePublished - 2007
Event8th International Conference on Quality Control by Artificial Vision - Le Creusot, France
Duration: May 23 2007May 25 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6356
ISSN (Print)0277-786X

Conference

Conference8th International Conference on Quality Control by Artificial Vision
Country/TerritoryFrance
CityLe Creusot
Period05/23/0705/25/07

Keywords

  • Holography
  • Inspection
  • MEMS
  • Metrology
  • Spatial heterodyned interferometry

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