Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control

L. R. Baylor; W. L. Gardner; S. J. Randolph; Y. F. Guan; P. D. Rack; J. A. Moore; M. N. Ericson

doi:10.1109/IVNC.2007.4480993

Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control

L. R. Baylor, W. L. Gardner, S. J. Randolph, Y. F. Guan, P. D. Rack, J. A. Moore, M. N. Ericson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07
Pages	197-199
Number of pages	3
DOIs	https://doi.org/10.1109/IVNC.2007.4480993
State	Published - 2007
Event	Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07 - Chicago, IL, United States Duration: Jul 8 2008 → Jul 12 2008

Publication series

Name	Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07

Conference

Conference	Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07
Country/Territory	United States
City	Chicago, IL
Period	07/8/08 → 07/12/08

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10.1109/IVNC.2007.4480993

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Baylor, L. R., Gardner, W. L., Randolph, S. J., Guan, Y. F., Rack, P. D., Moore, J. A., & Ericson, M. N. (2007). Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control. In Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07 (pp. 197-199). Article 4480993 (Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07). https://doi.org/10.1109/IVNC.2007.4480993

@inproceedings{898a52d64d914585b9df3b9c46ce820d,

title = "Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control",

author = "Baylor, \{L. R.\} and Gardner, \{W. L.\} and Randolph, \{S. J.\} and Guan, \{Y. F.\} and Rack, \{P. D.\} and Moore, \{J. A.\} and Ericson, \{M. N.\}",

year = "2007",

doi = "10.1109/IVNC.2007.4480993",

language = "English",

isbn = "1424411343",

series = "Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07",

pages = "197--199",

booktitle = "Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07",

note = "Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07 ; Conference date: 08-07-2008 Through 12-07-2008",

}

Baylor, LR, Gardner, WL, Randolph, SJ, Guan, YF, Rack, PD, Moore, JA & Ericson, MN 2007, Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control. in Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07., 4480993, Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07, pp. 197-199, Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07, Chicago, IL, United States, 07/8/08. https://doi.org/10.1109/IVNC.2007.4480993

Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control. / Baylor, L. R.; Gardner, W. L.; Randolph, S. J. et al.
Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07. 2007. p. 197-199 4480993 (Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control

AU - Baylor, L. R.

AU - Gardner, W. L.

AU - Randolph, S. J.

AU - Guan, Y. F.

AU - Rack, P. D.

AU - Moore, J. A.

AU - Ericson, M. N.

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/50249156356

U2 - 10.1109/IVNC.2007.4480993

DO - 10.1109/IVNC.2007.4480993

M3 - Conference contribution

AN - SCOPUS:50249156356

SN - 1424411343

SN - 9781424411344

T3 - Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07

SP - 197

EP - 199

BT - Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07

T2 - Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07

Y2 - 8 July 2008 through 12 July 2008

ER -

Baylor LR, Gardner WL, Randolph SJ, Guan YF, Rack PD, Moore JA et al. Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control. In Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07. 2007. p. 197-199. 4480993. (Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07). doi: 10.1109/IVNC.2007.4480993

Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control

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