Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control

L. R. Baylor, W. L. Gardner, S. J. Randolph, Y. F. Guan, P. D. Rack, J. A. Moore, M. N. Ericson

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations
Original languageEnglish
Title of host publicationTechnical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07
Pages197-199
Number of pages3
DOIs
StatePublished - 2007
EventTechnical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07 - Chicago, IL, United States
Duration: Jul 8 2008Jul 12 2008

Publication series

NameTechnical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07

Conference

ConferenceTechnical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07
Country/TerritoryUnited States
CityChicago, IL
Period07/8/0807/12/08

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