@inproceedings{898a52d64d914585b9df3b9c46ce820d,
title = "Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control",
author = "Baylor, {L. R.} and Gardner, {W. L.} and Randolph, {S. J.} and Guan, {Y. F.} and Rack, {P. D.} and Moore, {J. A.} and Ericson, {M. N.}",
year = "2007",
doi = "10.1109/IVNC.2007.4480993",
language = "English",
isbn = "1424411343",
series = "Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07",
pages = "197--199",
booktitle = "Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07",
note = "Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07 ; Conference date: 08-07-2008 Through 12-07-2008",
}