One-minute nano-tomography using hard X-ray full-field transmission microscope

Mingyuan Ge, David Scott Coburn, Evgeny Nazaretski, Weihe Xu, Kazimierz Gofron, Huijuan Xu, Zhijian Yin, Wah Keat Lee

Research output: Contribution to journalArticlepeer-review

78 Scopus citations

Abstract

Full field transmission X-ray microscopy (TXM) is a powerful technique for non-destructive 3D imaging with nanometer-scale spatial resolution. However, to date, the typical acquisition time with the hard X-ray TXM at a synchrotron facility is >10 min for a 3D nano-tomography dataset with sub-50 nm spatial resolution. This is a significant limit on the types of 3D dynamics that can be investigated using this technique. Here, we present a demonstration of one-minute nano-tomography with sub-50 nm spatial resolution. This achievement is made possible with an in-house designed and commissioned TXM instrument at the Full-field X-ray Imaging beamline at the National Synchrotron Light Source-II at Brookhaven National Laboratory. This capability represents an order of magnitude decrease in the time required for studying sample dynamics with 10 s of nm spatial resolution.

Original languageEnglish
Article number083109
JournalApplied Physics Letters
Volume113
Issue number8
DOIs
StatePublished - Aug 20 2018
Externally publishedYes

Funding

This research used resources at FXI beamline (18-ID) of the National Synchrotron Light Source-II, a U.S. Department of Energy (DOE) Office of Science User Facility operated for the DOE Office of Science by Brookhaven National Laboratory under Contract No. DE-SC0012704. We thank Karen Chen-Wiegart (Stony Brook University SBU/BNL), Lijie Zou (Wuhan University of Technology WUT/SBU), Chonghang Zhao (SBU), and Fei Chen (WUT) for the FeAl-Cu alloy sample. This research used resources of the Center for Functional Nanomaterials, which is a U.S. DOE Office of Science Facility, at Brookhaven National Laboratory under Contract No. DE-SC0012704; we thank Fernando Camino (BNL) for the support on focused ion beam-scanning electron microscopy (FIB-SEM) for TXM sample preparation. We thank Yeukuang Hwu and Huang-Han Chen of Academia Sinica, Taiwan, for their help during the instrument installation.

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