On the Origin of the Large Remanent Polarization in La:HfO2

Tony Schenk, Chris M. Fancher, Min Hyuk Park, Claudia Richter, Christopher Künneth, Alfred Kersch, Jacob L. Jones, Thomas Mikolajick, Uwe Schroeder

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107 Scopus citations

Abstract

The outstanding remanent polarization of 40 µC cm–2 reported for a 10 nm thin La:HfO2 film in 2013 has attracted much attention. However, up to now, no explanation for this large remanent polarization has been presented. Density functional theory and X-ray diffraction are used to shine light onto three major aspects that impact the macroscopically observed remanent polarization: phase fraction, spontaneous polarization, and crystallographic texture. Density functional theory calculations show that the spontaneous polarization (Ps) of La:HfO2 is indeed a bit larger than for other HfO2- or ZrO2-based compounds; however, the Ps is not large enough to explain the observed differences in remanent polarization. While neither phase fractions nor spontaneous polarization nor strain are significantly different from those in other HfO2 films, a prominent 020/002 texture distinguishes La doped from other HfO2-based ferroelectric films. Angular-dependent diffraction data provide a pathway to calculate the theoretically expected remanent polarization, which is in agreement with the experimental observations. Finally, an interplay of the in-plane strain and texture is proposed to impact the formation of the ferroelectric phase during annealing. Further aspects of the special role of La as a dopant are collected and discussed to motivate future research.

Original languageEnglish
Article number1900303
JournalAdvanced Electronic Materials
Volume5
Issue number12
DOIs
StatePublished - Dec 1 2019

Funding

T.S. gratefully acknowledges the German Research Foundation (Deutsche Forschungsgemeinschaft) for funding part of this research at NaMLab in the frame of the “Inferox” project (MI 1247/11‐2) as well as the financial support for the work at LIST from the Fonds National de la Recherche Luxembourg via the project CO‐FERMAT (FNR/P12/4853155/Kreisel). C.M.F. acknowledges support at the Oak Ridge National Laboratory by the DOE Office of Science User Facilities. M.H.P. was supported by Humboldt postdoctoral fellowship from Alexander von Humboldt Foundation. C.R. is grateful for support by the EFRE fund of the European Commission and by the Free State of Saxony (Germany). C.K. acknowledges the German Research Foundation (Deutsche Forschungsgemeinschaft) for funding in the frame of the “Inferox” project (MI 1247/11‐2).

Keywords

  • HfO
  • XRD
  • ferroelectrics
  • stress
  • texture

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