Novel zirconium nitride precursor: Synthesis, decomposition pathway, and pyrolysis of [(CH3)3Si]2NH·ZrCl4

Chaitanya K. Narula, Lawrence F. Allard

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

The reaction of hexamethyldisilazane with zirconium tetrachioride furnishes an adduct, [(CH3)3Si]2NH·ZrCl4, which is soluble in dichloromethane. The decomposition of [(CH3)3Si]2NH·ZrCl4 proceeds with the elimination of trimethylchlorosilane and hydrogen chloride and is complete at 600°C. The resulting powder is amorphous zirconium nitride which is highly susceptible to hydrolysis and oxidation. The pyrolysis of the precursor in a dynamic vacuum or ammonia atmosphere at 600°C and subsequent sintering of the powder at 900°C furnishes crystalline zirconium nitride. Transmission electron microscopy of the powder shows that the particles are coated with a thin zirconium oxide layer. Crystalline zirconium nitride powder, free from zirconium oxide impurities, is obtained if the sintering is carried out at 1075°C.

Original languageEnglish
Article number8/02864H
Pages (from-to)1881-1884
Number of pages4
JournalJournal of Materials Chemistry
Volume8
Issue number8
DOIs
StatePublished - Aug 1998
Externally publishedYes

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